AlN/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator

Applied Physics Letters

Volumn 102, Issue 11, 2013, Pages

  Sorokin, B P ^a   Kvashnin, G M ^a   Volkov, A P ^a   Bormashov, V S ^a   Aksenenkov, V V ^a   Kuznetsov, M S ^a   Gordeev, G I ^b   Telichko, A V ^b  

^a TECHNOLOGICAL INSTITUTE FOR SUPERHARD AND NOVEL CARBON MATERIALS   (Russian Federation)

^b MOSCOW INSTITUTE OF PHYSICS AND TECHNOLOGY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; GHZ BAND; HIGH-OVERTONE BULK ACOUSTIC RESONATORS; LAYERED STRUCTURES; PIEZO-ELECTRIC STRUCTURES; PIEZOELECTRIC FILM; Q-FACTORS;

PHYSICAL PROPERTIES; PHYSICS;

PIEZOELECTRICITY;

EID: 84875696633     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4798333     Document Type: Article

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