Unique properties of HBAR characteristics

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 439-442

  Mansfeld, G D ^a   Alekseev, S G ^a   Polzikova, N I ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

Attenuation; Electromechanical coupling coefficient; Impedance; Quality factor; Resonanc

Indexed keywords

ATTENUATION; ELECTROMECHANICAL COUPLING COEFFICIENT; IMPEDANCE; QUALITY FACTOR; RESONANC;

ACOUSTIC IMPEDANCE; ACOUSTICS; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; Q FACTOR MEASUREMENT;

ACOUSTIC WAVE REFLECTION;

EID: 67649353044     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2008.0107     Document Type: Conference Paper

References (6)

1. G.S.Kino, Acoustic waves: devices, imaging, and analog signal processing. Prentice-Hall Inc., Englewood Cliffs, NJ. J. Clerk Maxwell, A Treatise on Electricity and Magnetism, 3rd ed., vol.2. Oxford: Clarendon, 1982, pp.68-73
2. G. D. Mansfel'd, S. G. Alekseev, and N. I. Polzikova, "Equivalent Circuit of a Composite Acoustic Resonator for Microwave Radioelectronic Devices" Acoustical Physics. Vol.54. No.4. pp. 475- 480. 2008
3. G.D.Mansfeld, "Measurements of acoustic wave attnuation in La3Ga5SiO14 using HBAR technique", Proc.of IEEE Frequency Control Symposium, 1994, Boston, USA
4. Mansfeld G. D. "BAW composite resonator spectroscopy", Proc. of IEEE Ultrasonic Symposium. Cannes. France 17-19 June, 1994. pp.655
5. G. D. Mansfeld, S. G. Alekseev, and I.M.Kotelyansky, "Acoustic HBAR Spectroscopy of Metal (W, Ti, Mo, Al) Thin Films, Proc. of IEEE Ultrasonic Symp., Atlanta Georgia USA, , pp. 416-418 October 7-10, 2001
6. S. G. Alekseev, I. M. Kotelyanskii, G. D. Mansfel'd et al, " A Procedure for Measuring the Q Factor of and Attenuation in Microwave Composite Acoustic Resonators",Journ. of Comm.Technology and Electronics v.52, No8, pp..938-942, 2007 (Pubitemid 47383961)