Growth and characterization of lead-free piezoelectric BaZr 0.2 Ti 0.8 O 3 -Ba 0.7 Ca 0.3 TiO 3 thin films on Si substrates

Applied Surface Science

Volumn 270, Issue , 2013, Pages 377-381

  Luo, B C ^a,b   Wang, D Y ^a   Duan, M M ^b   Li, S ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

Electromechnical properties; Lead free piezoelectricity; Leakage

Indexed keywords

CRYSTALLOGRAPHY; ELECTRIC SPACE CHARGE; FERROELECTRIC CERAMICS; GRAIN GROWTH; GRAIN SIZE AND SHAPE; GROWTH TEMPERATURE; LEAD ZIRCONATE TITANATE; LEAKAGE (FLUID); MAGNETRON SPUTTERING; PIEZOELECTRICITY; SILICON; SINGLE CRYSTALS; SUBSTRATES;

CRYSTALLOGRAPHIC ORIENTATIONS; CRYSTALLOGRAPHIC TEXTURES; ELECTROMECHANICAL PROPERTY; ELECTROMECHNICAL PROPERTIES; LEAD ZIRCONATE TITANATE THIN FILMS; LEAD-FREE; OFF-AXIS RF MAGNETRON SPUTTERING; SPACE CHARGE LIMITED CONDUCTION;

THIN FILMS;

EID: 84875214318     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.01.033     Document Type: Article

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