Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography

Nanoscale Research Letters

Volumn 8, Issue 1, 2013, Pages 1-9

  Lorenzoni, Matteo ^a   Giugni, Andrea ^a   Torre, Bruno ^a  

^a ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

Author keywords

Dry etching mask; Nanocrystalline graphite; Scanning probe lithography

Indexed keywords

DRY ETCHING; GRAPHITE; LITHOGRAPHY; NANOCRYSTALS; SCANNING;

ETCHING MASKS; LATERAL RESOLUTION; LOCAL OXIDATION; NANOCRYSTALLINE GRAPHITE; SCANNING PROBE LITHOGRAPHY; SELECTIVE PATTERNING; SOLVENT DECOMPOSITIONS; TOP-DOWN FABRICATION;

SILICON;

EID: 84875177839     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-8-75     Document Type: Article

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