TiO2/SiO2 multilayer as an antireflective and protective coating deposited by microwave assisted magnetron sputtering

Opto-Electronics Review

Volumn 21, Issue 2, 2013, Pages 233-238

  Mazur, M ^a   Wojcieszak, D ^a   Domaradzki, J ^a   Kaczmarek, D ^a   Song, S ^b,c   Placido, F ^b,c  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b UNIVERSITY OF THE WEST OF SCOTLAND   (United Kingdom)

^c Scottish Universities Physics Alliance   (United Kingdom)

Author keywords

hardness; magnetron sputtering; optical coating; wettability

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; HARDNESS; MAGNETRON SPUTTERING; MORPHOLOGY; MULTILAYERS; OPTICAL COATINGS; OXIDE MINERALS; PROTECTIVE COATINGS; REFRACTIVE INDEX; SILICA; SILICON; SURFACE MORPHOLOGY; TITANIUM DIOXIDE; WETTING;

HIGH INDEX MATERIALS; LOW INDEX MATERIALS; MULTIFUNCTIONAL COATINGS; MULTILAYER SURFACES; PROTECTIVE PERFORMANCE; REACTIVE MAGNETRON SPUTTERING; RESIDUAL REFLECTIONS; TRANSMITTANCE AND REFLECTANCES;

FILM PREPARATION;

EID: 84875021210     PISSN: 12303402     EISSN: 18963757     Source Type: Journal    
DOI: 10.2478/s11772-013-0085-7     Document Type: Article

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