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Surface and Coatings Technology

Volumn 128-129, Issue 1, 2000, Pages 156-160

TiNx layer as an antireflection and antistatic coating for display

(5) Kim, N Y a Son, Y B a Oh, J H a Hwangbo, C K a Park, M C b

a Inha University (South Korea)

b Shinhan University (South Korea)

Author keywords

Antireflection; Sputtering; Titanium nitride

Indexed keywords

ETCHING; GLASS; MAGNETRON SPUTTERING; NITROGEN; POLYCRYSTALLINE MATERIALS; SILICA; TITANIUM NITRIDE; X RAY CRYSTALLOGRAPHY; X RAY PHOTOELECTRON SPECTROSCOPY;

ANTISTATIC COATING;

ANTIREFLECTION COATINGS;

EID: 0033707847 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(00)00574-0 Document Type: Article

Times cited : (39)

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