Characterization of reactive sputtered TiO2 thin films for gas sensor applications

Journal of Physics: Conference Series

Volumn 253, Issue 1, 2010, Pages

  Boyadzhiev, Stefan ^a,b   Georgieva, Velichka ^a   Rassovska, Milka ^b  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b TECHNICAL UNIVERSITY OF SOFIA   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; CRYSTAL STRUCTURE; GAS DETECTORS; MOLECULAR ELECTRONICS; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; REACTIVE SPUTTERING; REFRACTIVE INDEX; THICKNESS MEASUREMENT; TITANIUM DIOXIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

DIRECT CURRENT MAGNETRON SPUTTERING; LASER ELLIPSOMETRY; PROFILE ANALYSIS; QUARTZ RESONATORS; RADIO FREQUENCIES; SENSITIVE FILMS; SENSOR APPLICATIONS; STRUCTURE CHANGE;

THIN FILMS;

EID: 79952385775     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/253/1/012040     Document Type: Conference Paper

References (18)

1. Bennett J M, Pelletier E, Albrand G, Borgogno J P, Lazarides B, Carniglia C K, Schmell R A, Allen T H, Tuttle-Hart T, Guenther K H and Saxer A 1989 Appl. Opt. 28 3303
2. Karunagaran B, Kim K, Mangalaraj D, Yi J and Velumani S 2005 Sol. Energy Mater. Sol. Cells 88 199
3. Fujishima A and Honda K 1972 Nature 238 37
4. Yu J, Zhao X and Zhao Q 2000 Thin Solid Films 379 7
5. Brevet A, Fabreguette F, Imhoff L, Marco de Lucas M C, Heintz O, Saviot L, Sacilotti M and Bourgeois S 2002 Surf. Coat. Technol. 151-152 36
6. Madou M J and Morrison S R 1989 Chemical Sensing with Solid State Devices (Boston: Academic Press)
7. Tang H, Prasad K, Sanjines R and Lévy F 1995 Sens. Actuators B 26 71
8. Zhang Y, Fu W, Yang H, Qi Q, Zeng Y, Zhang T, Ge R and Zou G 2008 Appl. Surf. Sci. 254 5545
9. Guidi V, Carotta M C, Ferroni M, Martinelli G, Paglialonga L, Comini E and Sberveglieri G 1999 Sens. Actuators B 57 197
10. Idriss H and Seebauer E G 2000 J. Mol. Catal. A: Chem. 152 201
11. Chow L L W, Yuen M M F, Chan P C H and Cheung A T 2001 Sens. Actuators B 76 310
12. Syarif D G, Miyashita A, Yamaki T, Sumita T, Choi Y and Itoh H 2002 Appl. Surf. Sci. 193 287
13. Cunningham A 1998 Introduction to Bioanalytical Sensors (New York: Wiley)
14. Boiadjiev S I, Dobrikov G H and Rassovska M M 2007 Thin Solid Films 515 8465
15. Manolov S and Tihchev H 1982 Generators (Sofia: Tehnika) p 128 (in Bulgarian)
16. Sauerbery G 1959 Z. Phys. 155 206
17. Lazarova V, Spassov L, Andreev S, Manolov E and Popova L 1996 Vacuum 47 1423
18. Boyadjiev S and Rassovska M 2007 Proc. 16-th Scientific and Applied Science Conf. Electronics ET'2007 vol 4 p 121