Light trapping scheme of ICP-RIE glass texturing by SF6/Ar plasma for high haze ratio

Vacuum

Volumn 94, Issue , 2013, Pages 87-91

  Hussain, Shahzada Qamar ^a,b   Ahn, Shihyun ^a   Park, Hyeongsik ^a   Kwon, Giduk ^a   Raja, Jayapal ^a   Lee, Youngseok ^a   Balaji, Nagarajan ^a   Kim, Heeseok ^a   Le, Anh Huy Tuan ^a   Yi, Junsin ^a  

^a Sungkyunkwan University   (South Korea)

^b Process and Energy Systems Engineering Center PRESTIGE   (Pakistan)

Author keywords

Haze ratio; ICP RIE; Light trapping; SF6 Ar plasma; Thin film solar cell; XPS

Indexed keywords

ANISOTROPIC TEXTURING; GLASS SUBSTRATES; HAZE RATIOS; ICP-RIE; LIGHT-TRAPPING; LOW ETCHING RATES; THIN FILM SOLAR CELLS; WAVELENGTH REGIONS;

ELECTRIC PROPERTIES; PLASMAS; SOLAR CELLS; SUBSTRATES; SULFUR HEXAFLUORIDE; SURFACE STRUCTURE; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ITO GLASS;

EID: 84874882902     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2013.01.026     Document Type: Article

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