Fabrication of a meniscus microlens array made of anodic alumina by laser irradiation and electrochemical techniques

Electrochimica Acta

Volumn 94, Issue , 2013, Pages 269-276

  Kikuchi, Tatsuya ^a   Wachi, Yuhta ^a   Takahashi, Taka Aki ^a   Sakairi, Masatoshi ^a   Suzuki, Ryosuke O ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Aluminum; Anodizing; Electropolishing; Laser irradiation; Microlens array

Indexed keywords

ALUMINUM SUBSTRATE; ANODIC ALUMINA; ANODIC ALUMINA FILM; ANODIC OXIDE FILM; ELECTROCHEMICAL TECHNIQUES; ELECTROPOLISHED; MICRO-LENS ARRAYS; POROUS OXIDE FILM;

ALUMINUM; ALUMINUM SHEET; ELECTROLYTIC POLISHING; FABRICATION; HEAT RESISTANCE; LASER BEAM EFFECTS; MICROPOROSITY; OPTICAL INSTRUMENT LENSES; OXIDE FILMS;

ANODIC OXIDATION;

EID: 84874397120     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2013.02.020     Document Type: Article

References (47)

1. T.K. Shih, C.F. Chen, J.R. Ho, and F.T. Chuang Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding Microelectronic Engineering 83 2006 2499
2. M. Ashraf, C. Gupta, F. Chollet, S.V. Springham, and R.S. Rawat Geometrical characterization techniques for microlens made by thermal reflow of photoresist cylinder Optics and Lasers in Engineering 46 2008 711
3. C.T. Pan, M.F. Chen, P.J. Cheng, Y.M. Hwang, S.D. Tseng, and J.C. Huang Fabrication of gapless dual-curvature microlens as a diffuser for a LED package Sensors and Actuators A 150 2009 156
4. J. Xia, D. Qu, H. Yang, J. Chen, and W. Zhu Self assembly polymer microlens array for integral imaging Displays 31 2010 186
5. C.T. Pan, Y.C. Chen, M.F. Chen, and Y.C. Hsu Fabrication and design of various dimensions of multi-step ashpherical microlens arrays for OLED package Optics Communication 284 2011 3323
6. C.H. Chien, C.T. Pan, C.C. Hsieh, C.M. Yang, and K.L. Sher A study of the geometry of microball lens arrays using the novel batch-fabrication technique Sensors and Actuators A 122 2005 55
7. C.K. Chung, and Y.Z. Hong Fabrication and analysis of the reflowed microlens arrays using JSR THB-130 N photoresist with different heat treatments Microsystem Technologies 13 2007 523
8. W. Daschner, P. Long, R. Stein, C. Wu, and S.H. Lee General aspheric refractive micro-optics fabricated by optical lithography using a high energy beam sensitive glass gray-level mask Journal of Vacuum Science and Technology B 14 1996 3730
9. H. Jiang, X. Yuan, Z. Yun, Y.C. Chan, and Y.L. Lam Fabrication of microlens in photosensitive hybrid sol-gel films using a gray scale mask Materials Science and Engineering C 16 2001 99
10. J.J. Yang, Y.S. Liao, and C.F. Chen Fabrication of long hexagonal micro-lens array by applying gray-scale lithography in micro-replication process Optics Communication 270 2007 433
11. H. Yoshida, T. Kataoka, and M. Tanaka Fabrication of glass microlenses by ion diffusion under an electric field Journal of Non-Crystalline Solids 112 1989 352
12. R. Danzebrink, and M.A. Aegerter Deposition of optical microlens arrays by ink-jet processes Thin Solid Films 392 2001 223
13. F.T. O'Neill, G. Owen, and J.T. Sheridan Alteration of the profile of ink-jet-deposited UV-cured lenses using applied electric fields Optik 116 2005 158
14. C.Y. Chang, S.Y. Yang, L.S. Huang, and J.H. Chang Dynamic model based on genetic algorithms of prediction for the thermal deformation of machine tools Infrared Physics and Technology 48 2006 163
15. T. Yanagishita, K. Nishio, and H. Masuda Anti-reflection structures on lenses by nanoimprinting using ordered anodic porous alumina Applied Physics Express 2 2009 022001
16. T. Kikuchi, S.Z. Chu, S. Jonishi, M. Sakairi, and H. Takahashi Local surface modification of aluminum by laser irradiation Electrochimica Acta 47 2001 225
17. T. Kikuchi, M. Sakairi, H. Takahashi, Y. Abe, and N. Katayama Fabrication of Nickel Micro-pattern on Insulating Board by Anodizing/Laser Irradiation/Electrodeposition Surface and Coatings Technology 169-170C 2003 199
18. H. Jha, T. Kikuchi, M. Sakairi, and H. Takahashi Aluminum Microstructures on Anodic Alumina for Aluminum Wiring Boards ACS Applied Materials and Interfaces 2 2010 774
19. S.M. Moon, M. Sakairi, H. Takahashi, and K. Shimamura Electroless Ni-P Deposition through Imperfections in Anodic Oxide Films on Aluminum and Al 5052 Alloy Electrochemistry 71 2003 260
20. Y. Akiyama, T. Kikuchi, M. Ueda, M. Iida, M. Sakairi, and H. Takahashi Local deposition of polypyrrole on aluminum by anodizing, laser irradiation, and electrolytic polymerization and its application to the fabrication of micro-actuators Electrochimica Acta 51 2006 4834
21. T. Kikuchi, Y. Akiyama, M. Ueda, M. Sakairi, and H. Takahashi Fabrication of a three-dimensional micro-manipulator by laser irradiation and electrochemical techniques and the effect of electrolytes on its performance Electrochimica Acta 52 2007 4480
22. T. Kikuchi, S. Ueda, M. Ueda, M. Sakairi, and H. Takahashi Fabrication of Three-dimensional Micro-actuators with Polypyrrole/Gold Bi-layer Structure Journal of the Surface Finishing Society of Japan 60 2009 335
23. T. Kikuchi, M. Sakairi, and H. Takahashi Three-dimensional Microstructure Fabrication with Aluminum Anodizing, Laser Irradiation, and Electrodeposition Journal of the Electrochemical Society 150 2003 C567
24. T. Kikuchi, H. Takahashi, and T. Maruko Fabrication of three-dimensional platinum microstructures with laser irradiation and electrochemical techniques Electrochimica Acta 52 2007 2352
25. T. Kikuchi, M. Sakairi, H. Takahashi, Y. Abe, and N. Katayama Fabrication of Micropores and Grooves on Aluminum by Laser Irradiation and Electrochemical Technique Journal of the Electrochemical Society 148 2001 C740
26. T. Kikuchi, M. Sakairi, and H. Takahashi Growth of Porous Type Anodic Oxide Films at Micro-Areas on Aluminum Exposed by Laser Irradiation Electrochimica Acta 54 2009 7018
27. H. Jha, T. Kikuchi, M. Sakairi, and H. Takahashi Microfabrication of an Anodic Oxide Film by Anodizing Laser-textured Aluminum Journal of Micromechanics and Microengineering 17 2007 1949
28. J.P. Hoar, and G.C. Wood The sealing of porous anodic oxide films on aluminum Electrochimica Acta 7 1962 333
29. J.P. O'Sullivan, and G.C. Wood Electron-Optical Examination of Sealed Anodic Alumina Films: Surface and Interior Effects Journal of the Electrochemical Society 116 1969 1351
30. M. Koda, H. Takahashi, and S. Nagayama Reaction of Porous Anodic Oxide Films on Aluminum with Hot Water I. Effect of film thickness and reaction time on the degree of hydrogen and acid-dissolution characteristics Journal of the Surface Finishing Society of Japan 33 1982 242
31. C. Madore, O. Piotrowski, and D. Landolt Through-mask electrochemical micromachining of titanium Journal of the Electrochemical Society 146 1999 2526
32. P.F. Chauvy, C. Madore, and D. Landolt Electrochemical micromachining of titanium through a patterned oxide film Electrochemical and Solid-State Letters 2 1999 123
33. P.A. Jacquet Electrolytic method for obtaining bright copper surfaces Nature 135 1935 1076
34. D. Landolt Fundamental aspects of electropolishing Electrochimica Acta 32 1987 1
35. H. Jha, T. Kikuchi, M. Sakairi, and H. Takahashi Synthesis of aluminum oxy-hydroxide nanofibers from porous anodic alumina Nanotechnology 19 2008 395603
36. H. Masuda, and K. Fukuda Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina Science 268 1995 1466
37. F. Keller, M.S. Hunter, and D.L. Robinson Structural Features of Oxide Coatings on Aluminum Journal of the Electrochemical Society 100 1953 411
38. G.E. Thompson, R.C. Furneaux, G.C. Wood, J.A. Richardson, and J.S. Gode Nucleation and growth of porous anodic films on aluminium Nature 272 1978 433
39. S. Ono, M. Saito, M. Ishiguro, and H. Asoh Controlling factor of self-ordering of anodic porous alumina Journal of the Electrochemical Society 151 2004 B473
40. W. Lee, R. Ji, U. Gosele, and K. Nielsch Fast fabrication of long-range ordered porous alumina membranes by hard anodization Nature Materials 5 2006 741
41. S.Z. Chu, K. Wada, S. Inoue, M. Isogai, Y. Katsuta, and A. Yasumori Large-scale fabrication of ordered nanoporous alumina films with arbitrary pore intervals by critical-potential anodization Journal of the Electrochemical Society 153 2006 B384
42. J.E. Houser, and K.R. Hebert The role of viscous flow of oxide in the growth of self-ordered porous anodic alumina films Nature Materials 8 2009 415
43. K.R. Hebert, S.P. Albu, I. Paramasivam, and P. Schmuki Morphological instability leading to formation of porous anodic oxide films Nature Materials 11 2012 162
44. M. Koda, H. Takahashi, and M. Nagayama Reaction of Porous Anodic Oxide Films on Aluminum with Hot Water I. Effect of film thickness and reaction time on the degree of hydrogen and acid-dissolution characteristics Journal of the Surface Finishing Society of Japan 33 1982 242
45. T.A. Renshaw A study of Pore Structures on Anodized Aluminum Journal of the Electrochemical Society 108 1961 185
46. H. Takahashi, M. Nagayama, H. Akahori, and A. Kitahara Electron microscopy of porous anodic oxide films on aluminium by ultrathin sectioning technique. Part I. The structural change of the film during the current recovery period Journal of Electron Microscopy 22 1973 149
47. C. Chung, M. Liao, C. Lee, and H. Chang Anodization of nanoporous alumina on impurity- induced hemisphere curved surface of aluminum at room temperature Nanoscale Research Letters 6 2011 569