Fabrication and analysis of the reflowed microlens arrays using JSR THB-130 N photoresist with different heat treatments

Microsystem Technologies

Volumn 13, Issue 5-6, 2007, Pages 523-530

  Chung, C K ^a   Hong, Y Z ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TREATMENT; IMAGING SYSTEMS; OPTICAL DEVICES; OPTICAL RESOLVING POWER; PHOTORESISTS; REFRACTIVE INDEX;

FOCAL LENGTH; HEXAMETHYLDISILIZANE MATERIALS; MICROLENS ARRAYS;

MICROLENSES;

EID: 33847268153     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0193-0     Document Type: Article

References (8)

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3. JSR Corporation (2006) http://www.jsr.co.jp/jsr_e/eco/index.html
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