Fabrication of a three-dimensional micro-manipulator by laser irradiation and electrochemical techniques and the effect of electrolytes on its performance

Electrochimica Acta

Volumn 52, Issue 13, 2007, Pages 4480-4486

  Kikuchi, T ^a   Akiyama, Y ^a   Ueda, M ^a   Sakairi, M ^a   Takahashi, H ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Aluminum; Conducing polymer; Manipulator; MEMS; Micro actuator

Indexed keywords

ALUMINUM; ANODIC OXIDATION; ELECTROCHEMISTRY; FABRICATION; LASER BEAM EFFECTS; MANIPULATORS; MICROELECTROMECHANICAL DEVICES; POLYELECTROLYTES;

ACRYLIC ACID RESINS; ANODIZED ALUMINUM SPECIMENS; CONDUCING POLYMERS; MICROELECTROMECHANICAL SYSTEMS (MEMS);

MICROACTUATORS;

EID: 33847338392     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2006.12.043     Document Type: Article

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