Fabrication of three-dimensional platinum microstructures with laser irradiation and electrochemical technique

Electrochimica Acta

Volumn 52, Issue 7, 2007, Pages 2352-2358

  Kikuchi, T ^a   Takahashi, H ^a   Maruko, T ^b  

^a HOKKAIDO UNIVERSITY   (Japan)

^b Morisoejima Chikusei   (Japan)

Author keywords

Aluminum; Electroplating; Laser irradiation; MEMS; Platinum

Indexed keywords

ELECTROCHEMISTRY; HYDROCHLORIC ACID; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; NEODYMIUM LASERS; NICKEL DEPOSITS; NICKEL PLATING;

NETWORK MICROSTRUCTURE; OXALIC ACID; SODIUM HYDROXIDE; YTTRIUM ALUMINUM GARNET (YAG);

PLATINUM;

EID: 33846353829     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2006.08.040     Document Type: Article

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