A novel sensor for VOCs using nanostructured ZnO and MEMS technologies

Sensors and Transducers

Volumn 14, Issue SPEC. 1, 2012, Pages 244-252

  Pandya, H J ^a   Chandra, Sudhir ^a   Vyas, A L ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

MEMS; Nanostructured zinc oxide; VOC sensor; Zinc oxide films

Indexed keywords

ETHANOL VAPOR; ISOPROPYL ALCOHOLS; KEY FEATURE; LOW COSTS; MAXIMUM SENSITIVITY; MEMS TECHNOLOGY; MICROMACHINED SILICON; NANOSTRUCTURED ZINC OXIDES; NANOSTRUCTURED ZNO; OPERATING TEMPERATURE; SENSING LAYERS; SILICON MICROMACHINING; VOC SENSOR; VOLATILE ORGANIC COMPOUNDS (VOCS); ZNO THIN FILM;

ACETONE; ETHANOL; MEMS; OXIDE FILMS; SILICON; VAPORS; VOLATILE ORGANIC COMPOUNDS; ZINC OXIDE;

SENSORS;

EID: 84874100329     PISSN: None     EISSN: 17265479     Source Type: Trade Journal    
DOI: None     Document Type: Article

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