Femtosecond laser processing - A new enabling technology;Apdirbimas femtosekundiniu lazeriu - nauja perspektyvi technologija

Lithuanian Journal of Physics

Volumn 52, Issue 4, 2012, Pages 301-311

  Buividas, R ^a,b   Mikutis, M ^c,d   Kudrius, T ^c,d   Greicius A ^c   Slekys G ^c   Juodkazis, S ^a,b  

^a SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

^b MELBOURNE CENTRE FOR NANOFABRICATION   (Australia)

^c Altechna Co Ltd   (Lithuania)

^d VILNIUS UNIVERSITY   (Lithuania)

Author keywords

3D polymerisation; Micro optical elements; Ripples; Solar cells

Indexed keywords

EID: 84873677601     PISSN: 16488504     EISSN: None     Source Type: Journal    
DOI: 10.3952/physics.v52i4.2569     Document Type: Article

References (48)

1. E. Gamaly, Femtosecond Laser-Matter Interactions: Teory, Experiments, and Applications (Pan Stanford Publishing, Singapore, 2011).
2. Tree-dimensional Laser Microfabrication: Fundamentals and Applications, eds. H. Misawa and S. Juodkazis (Wiley, Weinheim, 2006).
3. L. Hallo, C. Mézel, A. Bourgeade, D. Hébert, E.G. Gamaly, and S. Juodkazis, Laser-matter interaction in transparent materials: confined microexplosion and jet formation, in: NATO Science for Peace and Security Series B: Physics and Biophysics (Springer, Netherlands, 2009) pp. 121-146.
4. J. Morikawa, A. Orie, T. Hashimoto, and S. Juodkazis, Termal and optical properties of the femtosecond-laser-structured and stress-induced birefringent regions of sapphire, Opt. Express 18(8), 8300-8310 (2010).
5. M. Malinauskas, A. Žukauskas, G. Bičkauskaite, R. Gadonas, and S. Juodkazis, Mechanisms of three-dimensional structuring of photo-polymers by tightly focussed femtosecond laser pulses, Opt. Express 18(10), 10209-10221 (2010).
6. M. Malinauskas, P. Danilevičius, and S. Juodkazis, Tree-dimensional micro-/nano-structuring via direct write polymerization with picosecond laser pulses, Opt. Express 19(6), 5602-5610 (2011).
7. E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses, Appl. Phys. Lett. 82(17), 2901-2903 (2003).
8. L. Bressel, D. de Ligny, C. Sonneville, V. MartinezAndrieux, V. Mizeikis, R. Buividas, and S. Juodkazis, Femtosecond laser induced density changes in GeO2 and SiO2 glasses: fictive temperature effect, Opt. Mater. Express 1, 605-613 (2011).
9. S. Juodkazis, K. Nishimura, and H. Misawa, Treedimensional laser structuring of materials at tight focusing, Chin. Opt. Lett. 5, S198-S200 (2007).
10. A. Marcinkevicius, V. Mizeikis, S. Juodkazis, S. Matsuo, and H. Misawa, Effect of refractive index-mismatch on laser microfabrication in silica glass, Appl. Phys. A 76, 257-260 (2003).
11. K. Hatanaka, T. Ida, H. Ono, S.-I. Matsushima, H. Fukumura, S. Juodkazis, and H. Misawa, Chirp effect in hard X-ray generation from liquid target when irradiated by femtosecond pulses, Opt. Express 16(17), 12650-12657 (2008).
12. S. Juodkazis, V. Mizeikis, and H. Misawa, Treedimensional microfabrication of materials by femtosecond lasers for photonics applications, J. Appl. Phys. 106(5), 051101 (2009).
13. A. Marcinkevicius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, Application of Bessel beams for microfabrication of dielectrics by femtosecond laser, Jpn. J. Appl. Phys. A 40(11), L1197-L1199 (2001).
14. S. Juodkazis, V. Mizeikis, S. Matsuo, K. Ueno, and H. Misawa, Tree-dimensional microand nanostructuring of materials by tightly focused laser radiation, Bull. Chem. Soc. Jpn. 81(4), 411-448 (2008).
15. M. Duocastella and C.B. Arnold, Bessel and annular beams for materials processing, Laser Photonics Rev. 6(5), 607 (2012) pp. 1-15; http://dx.doi.org/10.1002/lpor.201100031.
16. R. Buividas, L. Rosa, R. Šliupas, T. Kudrius, G. Šlekys, V. Datsyuk, and S. Juodkazis, Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback, Nanotechn. 22, 055304 (2011).
17. T. Kudrius, G. Šlekys, and S. Juodkazis, Surfacetexturing of sapphire by femtosecond laser pulses for photonic applications, J. Phys. D 43(14), 145501 (2010).
18. J. Sipe, J. Young, J. Preston, and H. Van Driel, Laser-induced periodic surface structure. I. Teory, Phys. Rev. B 27(2), 1141 (1983).
19. S. Juodkazis, N. Kujime, H. Okuno, V. Mizeikis, S. Matsuo, and H. Misawa, Towards nanostructuring of materials by ripples, in: CREST and QNN'03 Joint Int. Workshop (Hyogo, Japan, 21-23 July 2003) pp. 117-121.
20. H. Iwase, S. Kokubo, S. Juodkazis, and H. Misawa, Suppression of ripples on Ni surface via a polarization grating, Opt. Express 17(6), 4388-4396 (2009).
21. R. Buividas, M. Mikutis, G. Gervinskas, D. Day, G. Slekys, and S. Juodkazis, Femtosecond laser drilling of optical fibres for sensing in microfluidic applications, Proc. SPIE (2012) [in press].
22. A.Y. Vorobyev and C. Guo, Laser turns silicon superwicking, Opt. Express 18(7), 6455-6460 (2010).
23. G.-W. Römer, M. Jorritsma, D. Arnaldo del Cerro, B. Chang, V. Liimatainen, Q. Zhou, and B. Huisin'tveld, Laser micro-machining of hydrophobic-hydrophilic patterns for fluid driven selfalignment in micro-assembly, in: Proceedings of LPM2011 - the 12th International Symposium on Laser Precision Microfabrication, 2011.
24. R. Buividas, P. Stoddart, and S. Juodkazis, Laser fabricated ripple substrates for surface-enhanced Raman scattering, Ann. Phys. 524(11), L5-L10 (2012).
25. K.K. Seet, V. Mizeikis, S. Juodkazis, and H. Misawa, Tree-dimensional horizontal circular spirals photonic crystals with stop gaps below 1 μm, Appl. Phys. Lett. 88(22), 221101 (2006).
26. A. Vailionis, E.G. Gamaly, V. Mizeikis, W. Yang, A. Rode, and S. Juodkazis, Evidence of superdense Aluminum synthesized by ultra-fast microexplosion, Nature Commun. 2, 445 (2011).
27. S. Juodkazis, H. Misawa, E.G. Gamaly, B. LutherDavis, L. Hallo, P. Nicolai, and V. Tikhonchuk, Is the nano-explosion really microscopic?, J. NonCryst. Solids 355(18-21), 1160-1162 (2009).
28. M. Mazilu, S. Juodkazis, T. Ebisui, and H. Misawa, Structural characterization of shock-affected sapphire, Appl. Phys. A 86(2), 197-200 (2007).
29. S. Juodkazis, S. Kohara, Y. Ohishi, N. Hirao, A. Vailionis, V. Mizeikis, A. Saito, and A. Rode, Structural changes in femtosecond laser modified regions inside fused silica, J. Opt. 12(12), 124007 (2010).
30. V. Mizeikis, S. Kohara, Y. Onishi, N. Hirao, A. Saito, A. Vailionis, and S. Juodkazis, Synthesis of high-pressure phases of silica by laser-induced optical breakdown, Appl. Phys. A 104(3), 903-906 (2011).
31. J. Morikawa, E. Hayakawa, T. Hashimoto, R. Buividas, and S. Juodkazis, Termal imaging of a heat transport in regions structured by femtosecond laser, Opt. Express 19(21), 20542-20550 (2011).
32. S. Juodkazis, M. Sudzius, V. Mizeikis, H. Misawa, E.G. Gamaly, Y. Liu, O.A. Louchev, and K. Kitamura, Tree-dimensional recording by tightly focused femtosecond pulses in LiNbO3, Appl. Phys. Lett. 89, 062903 (2006).
33. E. Gamaly, S. Juodkazis, V. Mizeikis, H. Misawa, A. Rode, and W. Krolokowski, Modification of refractive index by a single fs-pulse confined inside a bulk of a photo-refractive crystal, Phys. Rev. B 81(5), 054113 (2010).
34. S. Juodkazis, V. Mizeikis, M. Sudžius, H. Misawa, K. Kitamura, S. Takekawa, E.G. Gamaly, W.Z. Krolikowski, and A.V. Rode, Laser induced memory bits in photorefractive LiNbO3 and LiTaO3, Appl. Phys. A 93(1), 129-133 (2008).
35. V. Mizeikis, H.-B. Sun, A. Marcinkevicius, J. Nishii, S. Juodkazis, S. Matsuo, and H. Misawa, Femtosecond laser micro-fabrication for tailoring photonic crystals in resins and silica, J. Photochem. Photobiol. A 145(1-2), 41-47 (2001).
36. V. Mizeikis, K.K. Seet, S. Juodkazis, and H. Misawa, Tree-dimensional woodpile photonic crystal templates for infrared spectral range, Opt. Lett. 29(17), 2061-2063 (2004).
37. K.K. Seet, V. Mizeikis, S. Matsuo, S. Juodkazis, and H. Misawa, Tree-dimensional spiral-architecture photonic crystals obtained by direct laser writing, Adv. Mater. 17(5), 541-545 (2005).
38. K.K. Seet, V. Mizeikis, S. Juodkazis, and H. Misawa, Spiral three-dimensional photonic crystals for telecomunications spectral range, Appl. Phys. A 82(4), 683-688 (2005).
39. K.K. Seet, V. Mizeikis, S. Juodkazis, and H. Misawa, Tree-dimentional circular spiral potonic crystal structures recorded by femtosecond pulses, J. Non-Cryst. Solids 352(23-25), 2390-2394 (2006).
40. S. Juodkazis, V. Mizeikis, K.K. Seet, H. Misawa, and U.G.K. Wegst, Mechanical properties and tuning of three-dimensional polymeric photonic crystals, Appl. Phys. Lett. 91(24), 241904 (2007).
41. S. Juodkazis, V. Mizeikis, K.K. Seet, M. Miwa, and H. Misawa, Two-photon lithography of nanorods in SU-8 photoresist, Nanotechnol. 16, 846-849 (2005).
42. K.K. Seet, V. Mizeikis, K. Kannari, S. Juodkazis, H. Misawa, N. Tetreault, and S. John, Templating and replication of spiral photonic crystals for silicon photonics, IEEE J. Sel. Top. Quant. Electr. 14(4), 1064-1073 (2008).
43. K.K. Seet, S. Juodkazis, V. Jarutis, and H. Misawa, Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8, Appl. Phys. Lett. 89, 024106 (2006).
44. M. Malinauskas, E. Brasselet, and S. Juodkazis, Fine structuring of integrated micro-optical components using lasers, SPIE Newsroom (2011); http://dx.doi.org/10.1117/2.1201107.003708.
45. E. Brasselet, M. Malinauskas, A. Žukauskas, and S. Juodkazis, Photo-polymerized microscopic vortex beam generators: precise delivery of optical orbital angular momentum, Appl. Phys. Lett. 97, 211108 (2010).
46. M. Malinauskas, H. Gilbergs, A. Žukauskas, K. Belazaras, V. Purlys, M. Rutkauskas, G. Bičkauskaite, D. Paipulas, R. Gadonas, A. Piskarskas, M. Farsari, and S. Juodkazis, Femtosecond laser polymerization of hybrid/integrated micro-optical elements and their characterization, J. Opt. 12(12), 124010 (2010).
47. J. Trull, L. Maigyte, V. Mizeikis, M. Malinauskas, S. Juodkazis, C. Cojocaru, M. Rutkauskas, M. Peckus, V. Sirutkaitis, and K. Staliunas, Formation of collimated beams by woodpile photonic crystal, Phys. Rev. B 84, 033812 (2011).
48. Q. Sun, S. Juodkazis, N. Murazawa, V. Mizeikis, and H. Misawa, Freestanding and movable photonic microstructures fabricated by photopolymerization with femtosecond laser pulses, J. Micromech. Microeng. 20, 035004 (2010).