Freestanding and movable photonic microstructures fabricated by photopolymerization with femtosecond laser pulses

Journal of Micromechanics and Microengineering

Volumn 20, Issue 3, 2010, Pages

  Sun, Quan ^a   Juodkazis, Saulius ^a,c   Murazawa, Naoki ^a   Mizeikis, Vygantas ^b   Misawa, Hiroaki ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

^c SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

3D MICROSTRUCTURES; DIRECT WRITING; FEMTO-SECOND LASER; FEMTOSECOND LASER PULSE; LASER TRAPPING; MICRO DEVICES; MICRO-MECHANICAL; MICRO-OPTICAL ELEMENTS; OPTO-FLUIDICS; PHOTONIC PROPERTIES; PHOTONIC STOP BAND; SHORTER WAVELENGTH; SIMPLE APPROACH; SOL-GEL HYBRIDS; THREE-DIMENSIONAL (3D);

FLUIDICS; MECHANICAL PROPERTIES; MICROSTRUCTURE; OPTICAL PROPERTIES; PHOTONIC DEVICES; PHOTOPOLYMERIZATION; PHOTOPOLYMERS; PULSED LASER APPLICATIONS; SHRINKAGE; THREE DIMENSIONAL; ZIRCONIUM;

ULTRASHORT PULSES;

EID: 76449113951     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/3/035004     Document Type: Article

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