Data preparation for focused ion beam machining of complex three-dimensional structures

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Volumn 222, Issue 1, 2008, Pages 67-76

  Lalev, G ^a   Dimov, S ^a   Kettle, J ^a   Van Delft, F ^b   Minev, R ^a  

^a CARDIFF UNIVERSITY   (United Kingdom)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

CAD CAM systems; FIB; FIB CVD; Focus ion beam machining; Layer based manufacturing; Lithography; Three dimensional nano and microstructuring

Indexed keywords

CAD/CAM SYSTEM; CAD/CAMS; COMPLEX SURFACE; DATA PREPARATION; EXPERIMENTAL STUDIES; EXPERIMENTAL VALIDATIONS; FIB-CVD; FOCUS ION BEAM; FOCUSED ION BEAM MACHINING; GDSII STREAM; LAYER-BY-LAYER FABRICATION; MICRO STRUCTURING; MICRO-MECHANICAL; MICROELECTRONIC APPLICATIONS; MICROOPTICAL; NANOMETRES; THREE-DIMENSIONAL STRUCTURE;

BEAM PLASMA INTERACTIONS; CHEMICAL VAPOR DEPOSITION; COMPUTER AIDED DESIGN; COMPUTER HARDWARE DESCRIPTION LANGUAGES; COMPUTER SOFTWARE; ION BOMBARDMENT; IONS; MACHINING; MICROELECTRONICS; THREE DIMENSIONAL;

FOCUSED ION BEAMS;

EID: 84873100479     PISSN: 09544054     EISSN: None     Source Type: Journal    
DOI: 10.1243/09544054JEM864     Document Type: Article

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