|
Volumn 527, Issue , 2013, Pages 299-302
|
Preparation and characterization of GeSx thin-films for resistive switching memories
|
Author keywords
Electrochemical metallization memory cells; Germanium sulphide; Keywords; Memory cells; Resistive random access memory; Resistive switching; Sputter deposition; Stoichiometry; Thin films
|
Indexed keywords
GERMANIUM SULPHIDE;
KEYWORDS;
MEMORY CELL;
RANDOM ACCESS MEMORIES;
RESISTIVE SWITCHING;
CHEMICAL PROPERTIES;
SEMICONDUCTOR STORAGE;
SPUTTER DEPOSITION;
STOICHIOMETRY;
SWITCHING SYSTEMS;
THIN FILMS;
VAPOR DEPOSITION;
FILM PREPARATION;
|
EID: 84872605258
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2012.12.032 Document Type: Article |
Times cited : (22)
|
References (13)
|