Development of piezoelectric deformable mirror for hard X-ray nanofocusing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8503, Issue , 2012, Pages

  Matsuyama, S ^a   Kimura, T ^b   Nakamori, H ^a   Imai, S ^a   Sano, Y ^a   Kohmura, Y ^c   Tamasaku, K ^c   Yabashi, M ^c   Ishikawa, T ^c   Yamauchi, K ^a,d  

^a OSAKA UNIVERSITY   (Japan)

^b HOKKAIDO UNIVERSITY   (Japan)

^c RIKEN SPring 8 Center   (Japan)

^d JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

At wavelength metrology; Deformable mirror; Kirkpatrick baez mirror; X ray mirror

Indexed keywords

DEFORMABLE MIRRORS; DEFORMATION TEST; FIZEAU INTERFEROMETERS; FOCUSED BEAMS; FOCUSING TESTS; HARD X RAY; KIRKPATRICK-BAEZ MIRROR; NANO-FOCUSING; PHASE RETRIEVAL; SPRING-8; X RAY MIRRORS; X-RAY FOCUSING;

DEFORMATION; LASER OPTICS; MIRRORS; OPTICAL SYSTEMS; OPTICAL TESTING; PIEZOELECTRIC ACTUATORS;

X RAYS;

EID: 84872582740     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.930276     Document Type: Conference Paper

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