Process dependence of H passivation and doping in H-implanted ZnO

Journal of Physics D: Applied Physics

Volumn 46, Issue 5, 2013, Pages

  Zhang, Z ^a   Look, D C ^b,c   Schifano, R ^d   Johansen, K M ^d   Svensson, B G ^d   Brillson, L J ^a,e  

^a The Ohio State University   (United States)

^b WRIGHT STATE UNIVERSITY   (United States)

^c AIR FORCE RESEARCH LABORATORY   (United States)

^d UNIVERSITY OF OSLO   (Norway)

^e OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING TEMPERATURES; BAND EDGE; CATHODOLUMINESCENCE SPECTROSCOPY; DEEP LEVEL EMISSION; DEPTH-RESOLVED; DOPANT IMPLANTATION; H-PASSIVATION; IMPLANTATION DOSE; PL EMISSION; PROCESS DEPENDENCE; TEMPERATURE DEPENDENT; THERMAL ACTIVATION; VACANCY-RELATED DEFECTS; ZNO;

ELECTRIC PROPERTIES; PHOTOLUMINESCENCE SPECTROSCOPY; ZINC OXIDE;

PASSIVATION;

EID: 84872560685     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/46/5/055107     Document Type: Article

References (48)

1. Look D C 2001 Mater. Sci. Eng. B 80 383 (Pubitemid 32331341)
2. Pearton S J, Norton D P, Ip L, Heo Y W and Steiner T 2005 Prog. Mater. Sci. 50 293
3. Look D C, Hemsky J W and Sizelove J R 1999 Phys. Rev. Lett. 82 2552
4. Janotti A and Van de Walle C G 2007 Phys. Rev. B 76 165202
5. Zhang S, Wei S-H and Zunger A 2001 Phys. Rev. B 63 075205
6. Hu J and Gordon R G 1993 Mater. Res. Soc. Symp. Proc. 283 891
7. Janotti A and Van de Walle C G 2007 Nature Mater. 6 44 (Pubitemid 46041475)
8. Nickel N H and Brendel K 2003 Phys. Rev. B 68 193303
9. Hofmann M, Hofstaetter A, Leiter F, Zhou H, Henecker F, Meyer B K, Orlinskii S B, Schmidt J and Baranov P G 2002 Phys. Rev. Lett. 88 045504
10. Sekiguchi T, Ohashi N and Terada Y 1997 Japan. J. Appl. Phys. 36 289
11. Ohashi N, Ishigaki T, Okada N, Taguchi H, Sakaguchi I, Hishita S, Sekiguchi T and Haneda H 2003 J. Appl. Phys. 93 6386
12. Lavrov E V, Weber J, Börrnert F, Van de Walle C G and Helbig R 2002 Phys. Rev. B 66 165205
13. Lee E -C and Chang K J 2004 Phys. Rev. B 70 115210
14. Wardle M G, Goss J P and Briddon P R 2005 Phys. Rev. B 71 155205 (Pubitemid 41754260)
15. Brauer G, Anwand W, Grambole D, Grenzer J, Skorupa W, Čížek J, Kuriplach J, Procházka I, Ling C C, So C K, Schulz D and Klimm D 2009 Phys. Rev. B 79 115212
16. Thomas D G and Lander J J 1956 J. Chem. Phys. 25 1136
17. Van de Walle C G 2000 Phys. Rev. Lett. 85 1012
18. Cox S F J et al 2001 Phys. Rev. Lett. 86 2601 (Pubitemid 32286713)
19. Strzhemechny Y M, Mosbacker H L, Look D C, Reynolds D C, Litton C W, Garces N Y, Giles N C, Halliburton L E, Niki S and Brillson L J 2004 Appl. Phys. Lett. 84 2545
20. Meyer B K et al 2004 Phys. Status Solidi b 241 231 (Pubitemid 39307710)
21. Shi A, Stavola M, Pearton S J, Thieme M, Lavrov E V and Weber J 2005 Phys. Rev. B 72 195211 (Pubitemid 43033250)
22. Monakhov E V, Christensen J S, Maknys K, Svensson B G and Kuznetsov A Yu 2005 Appl. Phys. Lett. 87 191910 (Pubitemid 41567637)
23. Qiu H, Meyer B, Wang Y and Wöll C 2008 Phys. Rev. Lett. 101 236401
24. Lavrov E V, Herklotz F and Weber J 2009 Phys. Rev. B 79 165210
25. McCluskey M D, Jokela S J, Zhuravlev K K, Simpson R J and Lynn K G 2002 Appl. Phys. Lett. 81 3807 (Pubitemid 35445519)
26. Bastin D, Lavrov E V and Weber J 2011 Phys. Rev. B 83 195210
27. McCluskey M D and Jokela S J 2009 J. Appl. Phys. 106 071101
28. Dong Y, Tuomisto F, Svensson B G, Kuznetsov A Yu and Brillson L J 2010 Phys. Rev. B 81 081201(R)
29. Johansen K M, Zubiaga A, Tuomisto F, Monakhov E V, Kuznetsov A Yu and Svensson B G 2011 Phys. Rev. B 84 115203
30. Johansen K M, Christensen J S, Monakhov E V, Kuznetsov A Yu and Svensson B G 2008 Appl. Phys. Lett. 93 152109
31. Kassier H, Hayes M, Auret F D, Diale M and Svensson B G 2008 Phys. Status Solidi c 5 569
32. Look D C, Zhang Z, Schifano R, Johansaen K M, Svensson B G and Brillson L J unpublished
33. Ziegler J F 2008 SRIM, http://www.srim.org
34. Monakhov E V, Kuznetsov A Yu and Svensson B G 2009 J. Phys. D: Appl. Phys. 42 153001
35. Katz E J, Zhang Z, Hughes H L, Chung K-B, Lucovsky G and Brillson L J 2011 J. Vac. Sci. Technol. B 29 011027
36. Brillson L J 2012 J. Phys. D: Appl. Phys. 45 183001
37. Drouin D, Couture A R, Joly D, Tastet X, Aimez V and Gauvin R 2007 Scanning 29 92 (Pubitemid 46944994)
38. Look D C, Reynolds D C, Sizelove J R, Jones R L, Litton C W, Cantwell G and Harsch W C 1998 Solid State Commun. 105 399
39. Look D C, Leedy K D, Vines L, Svensson B G, Zubiaga A, Tuomisto F, Doutt D R and Brillson L J 2011 Phys. Rev. B 84 115202
40. Shi A, Saboktakin M, Stavola M and Pearton S J 2004 Appl. Phys. Lett. 85 5601 (Pubitemid 40173578)
41. Lavrov E V, Herklotz F and Weber J 2009 Phys. Rev. Lett. 102 185502
42. Lee J-K, Nastasi M, Hamby D W and Lucca D A 2005 Appl. Phys. Lett. 86 171102 (Pubitemid 40861229)
43. Karazhanov S Zh, Marstein E S and Holt A 2009 J. Appl. Phys. 105 033712
44. Dangbegnon J K, Talla K and Botha J R 2012 Opt. Mater. 34 920
45. Zhang Z, Knutsen K E, Merz T, Kuznetsov A Yu, Svensson B G and Brillson L J 2012 Appl. Phys. Lett. 100 042107
46. Cai P F, You J B, Zhang X W, Dong J J, Yang X L, Yin Z G and Chen N F 2009 J. Appl. Phys. 105 083713
47. Look D C 2005 Semicond. Sci. Technol. 20 S55
48. Vines L, Monakhov E V, Schifano R, Mtangi W, Auret F D and Svensson B G 2010 J. Appl. Phys. 107 103707