3D x-ray uorescence microscopy with 1.7 μm resolution using lithographically fabricated micro-channel arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8502, Issue , 2012, Pages

  Woll, Arthur R ^a   Agyeman Budu, David ^a   Bilderback, Donald H ^a   Dale, Darren ^a   Kazimirov, Alexander Y ^a   Pfeifer, Mark ^b   Plautz, Tia ^a   Szebenyi, Thomas ^a   Untracht, Gavrielle ^a  

^a Department of Obstetrics Gynecology   (United States)

^b Advanced Design Consulting USA   (United States)

Author keywords

Confocal; DRIE; Nanolithography; X ray microprobe; X ray optics; X ray scan probe microscopy; X ray uorescence

Indexed keywords

ANGULAR REGIONS; CHANNEL ARRAYS; COLLECTION EFFICIENCY; CONFOCAL; CONFOCAL GEOMETRY; CRITICAL ANGLES; DEPTH RESOLUTION; DRIE; FABRICATED ARRAYS; FUTURE DESIGNS; INCIDENT BEAMS; MICRO-PROBES; MICRON SCALE; OPTIC DESIGN; POLYCAPILLARIES; PROBE MICROSCOPY; RAY TRACING SIMULATION; REFLECTED POWER; SIDE WALLS; SINGLE SOURCE; SMOOTH CHANNEL; SOLID ANGLE; SPECULAR REFLECTIONS; TOTAL EXTERNAL REFLECTION; TRANSMISSION BEHAVIOR;

DESIGN; NANOLITHOGRAPHY; OPTICS; THREE DIMENSIONAL COMPUTER GRAPHICS;

X RAYS;

EID: 84872530369     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.944365     Document Type: Conference Paper

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