NO2-sensing properties of WO3 nanorods prepared by glancing angle DC magnetron sputtering

Sensors and Actuators, B: Chemical

Volumn 176, Issue , 2013, Pages 685-691

  Horprathum, M ^a   Limwichean, K ^a   Wisitsoraat, A ^b   Eiamchai, P ^a   Aiempanakit, K ^c   Limnonthakul, P ^d   Nuntawong, N ^a   Pattantsetakul, V ^a   Tuantranont, A ^b   Chindaudom, P ^a  

^a and Transnational Anthropology   (Thailand)

^b NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

^c THAMMASAT UNIVERSITY   (Thailand)

^d SRINAKHARINWIROT UNIVERSITY   (Thailand)

Author keywords

Annealing; Glancing angle deposition; Tungsten trioxide

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; DEPOSITION; FIELD EMISSION MICROSCOPES; FILM PREPARATION; GAS SENSING ELECTRODES; MAGNETRON SPUTTERING; METALS; NANORODS; NITROGEN OXIDES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; THIN FILMS; TUNGSTEN; X RAY DIFFRACTION;

CRYSTAL STRUCTURE AND MORPHOLOGY; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; GAS SENSING APPLICATIONS; GLANCING ANGLE DEPOSITION; GLANCING ANGLE DEPOSITION TECHNIQUE; GRAZING INCIDENCE X-RAY DIFFRACTION; REACTIVE DC MAGNETRON SPUTTERING; TUNGSTEN TRIOXIDE;

CRYSTAL STRUCTURE;

EID: 84872517443     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.09.077     Document Type: Article

References (22)

1. 3 thin-film sensors, Sensors and Actuators B 105 (2) (2005) 271-277.
2. 2 gas sensor based on ZnO nanorod grown by ultrasonic irradiation, Sensors and Actuators B 141 (2009) 239-243.
3. C. Wang, L. Yin, L. Zhang, D. Xiang, R. Gao, Metal oxide gas sensors: sensitivity and influencing factors, Sensors 10 (2010) 2088-2106.
4. 3 gas sensors prepared by thermal oxidization of tungsten, Sensors and Actuators B 133 (2008) 321-326.
5. 3 nanoparticles for acetone selective detection, Chemistry of Materials 20 (2008) 4794-4796.
6. 3 nanostructures produced with hot-wire chemical vapor deposition, Thin Solid Films 517 (12) (2009) 3596-3599.
7. 3 nanorods/nanobelts synthesized via physical vapor deposition process, Chemical Physics Letters 367 (1-2) (2003) 214-218.
8. K. Robbie, M.J. Brett, Sculptured thin films and glancing angle deposition: growth mechanics and applications, Journal of Vacuum Science and Technology A 15 (3) (1997) 1460-1465.
9. Y.-P. Zhao, D.-X. Ye, G.-C. Wang, T.-M. Lu, Designing nanostructures by glancing angle deposition, SPIE Proceedings 5219 (2003) 59-73
10. D. Deniz, D.J. Frankel, R.J. Lad, Nanostructured tungsten and tungsten trioxide films prepared by glancing angle deposition, Thin Solid Films 518 (2010) 4095-4099.
11. D. Deniz, R.J. Lad, Temperature threshold for nanorod structuring of metal and oxide films grown by glancing angle deposition, Journal of Vacuum Science and Technology A 29 (2011) 011020.
12. 3 pillar-type and helical-type thin film structures to be used in microbatteries, Journal of Power Sources 172 (2007) 422-427.
13. 3 nanorods/films prepared by oblique angle deposition, Journal of Vacuum Science and Technology B 25 (2007) 1875-1881.
14. J. Tamaki, Z. Zhang, K. Fujimori, M. Akiyama, T. Harada, N. Miura, N. Yamazoe, Grain-size effects in tungsten oxide-based sensor for nitrogen oxides, Journal of the Electrochemical Society 141 (1994) 2207-2210.
15. 3 thin films, Sensors and Actuators B 128 (2007) 173-178.
16. D. Vick, L.J. Friedrich, S.K. Dew, M.J. Brett, K. Robbie, M. Seto, T. Smy, Selfshadowing and surface diffusion effects in obliquely deposited thin films, Thin Solid Films 339 (1999) 88-94.
17. A. Thornton, High rate thick film growth, Annual Review of Materials Science 7 (1977) 239-260.
18. 2 and O3, Sensors and Actuators B 47 (1998) 92-99.
19. G.-J. Li, X.-H. Zhang, S. Kawi, Relationships between sensitivity, catalytic activity, and surface areas of SnO gas sensors, Sensors and Actuators B 60 (1999) 64-70.
20. 3 sensor response according to operating temperature: experiment and modeling, Sensors and Actuators B 124 (1) (2007) 24-29.
21. S.C. Naisbitt, K.F.E. Pratt, D.E. Williams, I.P. Parkin, A microstructural model of semiconducting gas sensor response: the effects of sintering temperature on the response of chromium titanate (CTO) to carbon monoxide, Sensors and Actuators B 114 (2006) 969-977.
22. D.E. Williams, Semiconducting oxides as gas-sensitive resistors, Sensors and Actuators B 57 (1999) 1-16.