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Volumn 124, Issue 1, 2007, Pages 24-29

WO3 sensor response according to operating temperature: Experiment and modeling

Author keywords

Gas sensor; Modeling; WO3

Indexed keywords

ELECTRIC CONDUCTIVITY; ISOTHERMS; MICROELECTRODES; OZONE; PLATINUM; SILICA; THIN FILMS; TUNGSTEN;

EID: 34249022267     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.11.036     Document Type: Article
Times cited : (40)

References (16)
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    • Williams, D.E.1
  • 4
    • 0032122155 scopus 로고    scopus 로고
    • Physical and structural characterization of tungsten oxide thin films for NO gas detection
    • Manno D., Serra A., Di Giulio M., Micocci G., and Tepore A. Physical and structural characterization of tungsten oxide thin films for NO gas detection. Thin Solid Films 324 (1998) 44-51
    • (1998) Thin Solid Films , vol.324 , pp. 44-51
    • Manno, D.1    Serra, A.2    Di Giulio, M.3    Micocci, G.4    Tepore, A.5
  • 6
    • 0002321634 scopus 로고    scopus 로고
    • A thin film sensing element for ozone, humidity and temperature
    • Qu W., and Wlodarski W. A thin film sensing element for ozone, humidity and temperature. Sens. Actuators B 64 (2000) 42-48
    • (2000) Sens. Actuators B , vol.64 , pp. 42-48
    • Qu, W.1    Wlodarski, W.2
  • 9
    • 19844374381 scopus 로고    scopus 로고
    • Grain size effect in sputtered tungsten trioxide thin films on the sensitivity to ozone
    • Gillet M., Aguir K., Bendahan M., and Mennini P. Grain size effect in sputtered tungsten trioxide thin films on the sensitivity to ozone. Thin Solid Films 484 (2005) 358-363
    • (2005) Thin Solid Films , vol.484 , pp. 358-363
    • Gillet, M.1    Aguir, K.2    Bendahan, M.3    Mennini, P.4
  • 10
    • 34249077573 scopus 로고    scopus 로고
    • Influence of rf sputtered parameters on tungsten trioxide response sensors
    • Barcelona, Spain
    • Boulmani R., Bendahan M., and Aguir K. Influence of rf sputtered parameters on tungsten trioxide response sensors. Proceedings of the Eurosensors XIX. Barcelona, Spain (September 2005)
    • (2005) Proceedings of the Eurosensors XIX
    • Boulmani, R.1    Bendahan, M.2    Aguir, K.3
  • 11
    • 34249068868 scopus 로고    scopus 로고
    • M.J. Madou, S. Roy Morrisson, Chemical Sensing with Solid State Devices, chap3: Solid/Gas Interfaces, Academic Press, 1989, pp. 67-72.
  • 16
    • 0019018746 scopus 로고
    • Simulation of impurity freezout through numerical solution of Poisson's equation and application to MOS device behaviour
    • Jeager R.C., and Gaensslen F.H. Simulation of impurity freezout through numerical solution of Poisson's equation and application to MOS device behaviour. IEEE Trans. Electron Dev. 27 (1980) 914-920
    • (1980) IEEE Trans. Electron Dev. , vol.27 , pp. 914-920
    • Jeager, R.C.1    Gaensslen, F.H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.