WO3 pillar-type and helical-type thin film structures to be used in microbatteries

Journal of Power Sources

Volumn 172, Issue 1, 2007, Pages 422-427

  Figueroa, R ^a   Cruz, Tersio G S ^a   Gorenstein, A ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

Microbatteries; Reactive sputtering; Thin films; Tungsten oxide

Indexed keywords

INTERCALATION; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TUNGSTEN COMPOUNDS;

CHARGE CAPACITY; ELECTROCHEMICAL INTERCALATION DEVICES; GLANCING ANGLE DEPOSITION; MICROBATTERIES;

THIN FILMS;

EID: 34548670039     PISSN: 03787753     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jpowsour.2007.05.080     Document Type: Article

References (32)

1. Wakihara M. Mater. Sci. Eng. R33 (2001) 109-134
2. Tarascon J.M., and Armand M. Nature 414 (2001) 359-367
3. Winter M., Besenhard J.O., and Spahr M.E. Petr Nvák. Adv. Mater. 10 (1998) 725-763
4. Ritchie A.G. J. Power Sources 96 (2001) 1-4
5. Bates J.B., Dudney N.J., Neudecker B., Ueda A., and Evans C.D. Solid State Ionics 135 (2000) 33-45
6. Souquet J.L., and Duclot M. Solid State Ionics 148 (2002) 375-379
7. Katz H., Bögel W., and Büchel J.-P. J. Power Sources 72 (1998) 43-50
8. Jones S.D., Akridge J.R., and Shokoohi F.K. Solid State Ionics 69 (1994) 357-368
9. Brant K. Solid State Ionics 69 (1994) 173-183
10. Dick B., Brett M.J., Smy T.J., Freeman M.R., Malac M., and Egerton R.F. J. Vac. Sci. Technol. A 18 (2000) 1838-1844
11. Lintymer J., Gaviolle J., Martin N., and Takadoum J. Surf. Coat. Tech. 174/175 (2003) 316-323
12. Kennedy S.R., Brett M.J., Toader O., and John S. Nanoletters 2 (2002) 59-62
13. Robbie K., and Brett M.J. J. Vac. Sci. Tech. A 15 (1997) 1460-1465
14. Zhang G., and Zhao Y. J. Appl. Phys. 95 (2004) 267-271
15. Figueroa R., Kleinke M., Cruz T.G.S., and Gorenstein A. J. Power Sources 162 (2006) 1351-1356
16. Granqvist C.G. Electrochimica Acta 44 (1999) 3005-3015
17. Bueno P.R., Faria R.C., Avellaneda C.O., Leite E.R., and Bulhões L.O.S. Solid State Ionics 158 (2003) 415-426
18. Robbie K., Sit J.C., and Brett M.J. J. Vac. Sci. Tech. B 16 (1998) 1115-1122
19. Vick D., Smy T., and Brett M.J. J. Mater. Res. 17 (2002) 2904-2911
20. Sit J.C., Vick D., Robbie K., and Brett M.J. J. Mater. Res. 14 (1999) 1197-1199
21. Dirks A.G., and Leamy H.J. Thin solid films 47 (1977) 219-233
22. Karabacak T., Singh J.P., Zhao Y.-P., Wang G.-C., and Lu T.-M. Phys. Rev. B 68 1-5 (2003) 125408
23. Harris K.D., Brett M.J., and Smy T.J. Christopher Backhouse. J. Electrochem. Soc. 147 (2000) 2002-2006
24. Tait R.N., Smy T., and Brett M.J. Thin Solid Films 226 (1993) 196-201
25. Vick D., Friedrich L.J., Dew S.K., Brett M.J., Robbie K., Seto M., and Smy T. Thin Solid Films 339 (1999) 88-94
26. Messier R., Gehrke T., Frankel C., Venugopal V.C., Otaño W., and Lakhtakia A. J. Vac. Sci. Technol. A 15 (1997) 2148-2152
27. Karabacak T., Wang G.C., and Lu T.M. J. Vac. Sci. Technol. A 22 (2004) 1778-1784
28. Ye D.-X., Zhao Y.-P., Yang G.-R., Zhao Y.-G., Wang G.-C., and Lu T.-M. Nanotechnology 13 (2002) 615-618
29. Maissel L.I., and Glang R. Handbook of Thin Film technology (1970), McGraw-Hill Book Company
30. Monteiro O.R. Annu. Rev. Mater. Res 31 (2001) 111-137
31. Sakurai Y., Okada S., Yamaki J., and Okada T. J. Power Sources 20 (1987) 173-177
32. Zang J.-G., McGraw J.M., Turner J., and Ginley D. J. Electrochem. Soc. 144 (1997) 1630-1634