SCOPUS 정보 검색 플랫폼

Volumn 102, Issue 1, 2013, Pages

Strange hardness characteristic of hydrogenated diamond-like carbon thin film by plasma enhanced chemical vapor deposition process

(3) Dwivedi, Neeraj a,b Kumar, Sushil a Malik, Hitendra K b

a NATIONAL PHYSICAL LABORATORY (India)

b INDIAN INSTITUTE OF TECHNOLOGY DELHI (India)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING RATIO; CHEMICAL VAPOR DEPOSITION PROCESS; DIAMOND-LIKE CARBON THIN FILMS; HYDROGEN CONTENTS; MICROSCOPIC TECHNIQUES; SELF-BIAS; STRUCTURAL CHANGE;

CARBON FILMS; HYDROGENATION; MECHANICAL PROPERTIES; SILVER; VAPORS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 84872350916 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4775372 Document Type: Article

Times cited : (34)

References (32)

1
- 20944449316
- 10.1063/1.1920434
- F. Liao, S. L. Girshick, W. M. Mook, W. W. Gerberich, and M. R. Zachariah, Appl. Phys. Lett. 86, 171913 (2005). 10.1063/1.1920434
- (2005) Appl. Phys. Lett. , vol.86 , pp. 171913
- Liao, F.¹ Girshick, S.L.² Mook, W.M.³ Gerberich, W.W.⁴ Zachariah, M.R.⁵

2
- 0036504729
- 10.1116/1.1459722
- S. Veprek and A. S. Argon, J. Vac. Sci. Technol. B 20, 650 (2002). 10.1116/1.1459722
- (2002) J. Vac. Sci. Technol. B , vol.20 , pp. 650
- Veprek, S.¹ Argon, A.S.²

3
- 68949085660
- 10.1103/PhysRevB.79.245426
- R. F. Zhang, A. S. Argon, and S. Veprek, Phys. Rev. B 79, 245426 (2009). 10.1103/PhysRevB.79.245426
- (2009) Phys. Rev. B , vol.79 , pp. 245426
- Zhang, R.F.¹ Argon, A.S.² Veprek, S.³

4
- 36749117475
- 10.1063/1.94056
- B. Dichler, A. Bubenzer, and P. Koidl, Appl. Phys. Lett. 42, 636 (1983). 10.1063/1.94056
- (1983) Appl. Phys. Lett. , vol.42 , pp. 636
- Dichler, B.¹ Bubenzer, A.² Koidl, P.³

5
- 34548645464
- 10.1063/1.2777643
- S. Peter, K. Graupner, D. Grambole, and F. Ritcher, J. Appl. Phys. 102, 053304 (2007). 10.1063/1.2777643
- (2007) J. Appl. Phys. , vol.102 , pp. 053304
- Peter, S.¹ Graupner, K.² Grambole, D.³ Ritcher, F.⁴

6
- 84862832884
- 10.1021/am200939j
- N. Dwivedi, S. Kumar, and H. K. Malik, ACS Appl. Interfaces 3, 4268 (2011). 10.1021/am200939j
- (2011) ACS Appl. Interfaces , vol.3 , pp. 4268
- Dwivedi, N.¹ Kumar, S.² Malik, H.K.³

7
- 84865524312
- 10.1063/1.4739287
- N. Dwivedi, S. Kumar, and H. K. Malik, J. Appl. Phys. 112, 023518 (2012). 10.1063/1.4739287
- (2012) J. Appl. Phys. , vol.112 , pp. 023518
- Dwivedi, N.¹ Kumar, S.² Malik, H.K.³

8
- 84862964909
- 10.1063/1.3675164
- N. Dwivedi, S. Kumar, and H. K. Malik, J. Appl. Phys. 111, 014908 (2012). 10.1063/1.3675164
- (2012) J. Appl. Phys. , vol.111 , pp. 014908
- Dwivedi, N.¹ Kumar, S.² Malik, H.K.³

9
- 33846036454
- 10.1088/0953-8984/18/48/007
- J. T. Titantah, D. Lamoen, E. Neyts, and A. Bogaerts, J. Phys. Condens. Matter 18, 10803 (2006). 10.1088/0953-8984/18/48/007
- (2006) J. Phys. Condens. Matter , vol.18 , pp. 10803
- Titantah, J.T.¹ Lamoen, D.² Neyts, E.³ Bogaerts, A.⁴

10
- 24344480106
- 10.1063/1.2011786
- F. Yubero, V. J. Rico, J. P. Espinos, J. Cotrino, and A. R. G. Elipe, Appl. Phys. Lett. 87, 084101 (2005). 10.1063/1.2011786
- (2005) Appl. Phys. Lett. , vol.87 , pp. 084101
- Yubero, F.¹ Rico, V.J.² Espinos, J.P.³ Cotrino, J.⁴ Elipe, A.R.G.⁵

11
- 17044382183
- 10.1016/j.jnoncrysol.2005.01.058
- N. Maitre, S. Camelio, A. Barracono, T. Girardeau, and E. J. Breelle, Non-Cryst. Solids 351, 877 (2005). 10.1016/j.jnoncrysol.2005.01.058
- (2005) Non-Cryst. Solids , vol.351 , pp. 877
- Maitre, N.¹ Camelio, S.² Barracono, A.³ Girardeau, T.⁴ Breelle, E.J.⁵

12
- 75649127268
- 10.1063/1.3273412
- S. V. Singh, T. Zaharia, M. Creatore, R. Groenen, K. V. Hege, and M. C. M. V. D. Sanden, J. Appl. Phys. 107, 013305 (2010). 10.1063/1.3273412
- (2010) J. Appl. Phys. , vol.107 , pp. 013305
- Singh, S.V.¹ Zaharia, T.² Creatore, M.³ Groenen, R.⁴ Hege, K.V.⁵ Sanden, M.C.M.V.D.⁶

13
- 0034275677
- 10.1116/1.1289699
- D. Sarangi, O. S. Panwar, S. Kumar, and R. Bhattacharyya, J. Vac. Sci. Technol. A 18, 2302 (2000). 10.1116/1.1289699
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2302
- Sarangi, D.¹ Panwar, O.S.² Kumar, S.³ Bhattacharyya, R.⁴

14
- 0035907515
- 10.1016/S0257-8972(01)01271-3
- E. Tomasella, C. Meunier, and S. Mikhailov, Surf. Coat. Technol. 141, 286 (2001). 10.1016/S0257-8972(01)01271-3
- (2001) Surf. Coat. Technol. , vol.141 , pp. 286
- Tomasella, E.¹ Meunier, C.² Mikhailov, S.³

15
- 0000578547
- 10.1088/0953-8984/10/19/004
- J. K. Walters, R. J. Newport, S. F. Parker, W. S. Howells, and G. B. Wye, J. Phys. Condens. Matter 10, 4161 (1998). 10.1088/0953-8984/10/19/004
- (1998) J. Phys. Condens. Matter , vol.10 , pp. 4161
- Walters, J.K.¹ Newport, R.J.² Parker, S.F.³ Howells, W.S.⁴ Wye, G.B.⁵

16
- 0006135044
- 10.1103/PhysRevB.49.7060
- S. Iarlori, G. Galli, and O. Martini, Phys. Rev. B 49, 7060 (1994). 10.1103/PhysRevB.49.7060
- (1994) Phys. Rev. B , vol.49 , pp. 7060
- Iarlori, S.¹ Galli, G.² Martini, O.³

17
- 0009661538
- 10.1126/science.241.4868.913
- J. C. Angus and C. C. Heyman, Science 241, 913 (1988). 10.1126/science.241.4868.913
- (1988) Science , vol.241 , pp. 913
- Angus, J.C.¹ Heyman, C.C.²

18
- 80054818317
- 10.1016/j.ca2011.06.013
- N. Dwivedi and S. Kumar, Curr. Appl. Phys. 12, 247 (2012). 10.1016/j.cap.2011.06.013
- (2012) Curr. Appl. Phys. , vol.12 , pp. 247
- Dwivedi, N.¹ Kumar, S.²

19
- 0021411716
- 10.1016/0040-6090(84)90123-8
- B. Johnson and S. Hogmark, Thin Solid Films 114, 257 (1984). 10.1016/0040-6090(84)90123-8
- (1984) Thin Solid Films , vol.114 , pp. 257
- Johnson, B.¹ Hogmark, S.²

20
- 77954204751
- 10.1063/1.3415548
- T. S. Santra, C. H. Liu, T. K. Bhattacharyya, P. Patel, and T. K. Barik, J. Appl. Phys. 107, 124320 (2010). 10.1063/1.3415548
- (2010) J. Appl. Phys. , vol.107 , pp. 124320
- Santra, T.S.¹ Liu, C.H.² Bhattacharyya, T.K.³ Patel, P.⁴ Barik, T.K.⁵

21
- 84872320129
- 10.1063/1.4721654
- T. S. Santra, T. K. Bhattacharyya, F. G. Tseng, and T. K. Barik, AIP Adv. 2, 022132 (2012). 10.1063/1.4721654
- (2012) AIP Adv. , vol.2 , pp. 022132
- Santra, T.S.¹ Bhattacharyya, T.K.² Tseng, F.G.³ Barik, T.K.⁴

22
- 46449093029
- 10.1063/1.2938747
- C. Wang, S. Yang, Q. Wang, Z. Wang, and J. Zhang, J. Appl. Phys. 103, 123531 (2008). 10.1063/1.2938747
- (2008) J. Appl. Phys. , vol.103 , pp. 123531
- Wang, C.¹ Yang, S.² Wang, Q.³ Wang, Z.⁴ Zhang, J.⁵

23
- 36549103692
- 10.1063/1.344462
- X. Jiang, K. Reichelt, and B. Stritzker, J. Appl. Phys. 66, 5805 (1989). 10.1063/1.344462
- (1989) J. Appl. Phys. , vol.66 , pp. 5805
- Jiang, X.¹ Reichelt, K.² Stritzker, B.³

24
- 33748353813
- 10.1088/0022-3727/39/18/R01
- A. Erdemir and C. Donnet, J. Phys. D: Appl. Phys. 39, R311 (2006). 10.1088/0022-3727/39/18/R01
- (2006) J. Phys. D: Appl. Phys. , vol.39 , pp. 311
- Erdemir, A.¹ Donnet, C.²

25
- 84862778345
- 10.1016/j.matchemphys.2012.02.050
- N. Dwivedi, S. Kumar, and H. K. Malik, Mater. Chem. Phys. 134, 7 (2012). 10.1016/j.matchemphys.2012.02.050
- (2012) Mater. Chem. Phys. , vol.134 , pp. 7
- Dwivedi, N.¹ Kumar, S.² Malik, H.K.³

26
- 0000879286
- 10.1103/PhysRevB.48.4777
- P. J. Fallon, V. S. Veerasamy, C. A. Davis, J. Robertson, G. A. J. Amaratunga, and W. I. Milne, Phys. Rev. B 48, 4777 (1993). 10.1103/PhysRevB.48. 4777
- (1993) Phys. Rev. B , vol.48 , pp. 4777
- Fallon, P.J.¹ Veerasamy, V.S.² Davis, C.A.³ Robertson, J.⁴ Amaratunga, G.A.J.⁵ Milne, W.I.⁶

27
- 60049095402
- 10.1002/ppa200800011
- S. Singh, M. Pandey, R. Kishore, N. Chand, S. Dash, A. Tyagi, and D. Patil, Plasma Process. Polym. 5, 853 (2008). 10.1002/ppap.200800011
- (2008) Plasma Process. Polym. , vol.5 , pp. 853
- Singh, S.¹ Pandey, M.² Kishore, R.³ Chand, N.⁴ Dash, S.⁵ Tyagi, A.⁶ Patil, D.⁷

28
- 80051791716
- 10.1016/j.apsusc.2011.06.114
- N. Dwivedi, S. Kumar, and H. K. Malik, Appl. Surf. Sci. 257, 9953 (2011). 10.1016/j.apsusc.2011.06.114
- (2011) Appl. Surf. Sci. , vol.257 , pp. 9953
- Dwivedi, N.¹ Kumar, S.² Malik, H.K.³

29
- 8744258828
- 10.1098/rsta.2004.1452
- A. C. Ferrari and J. Robertson, Philos. Trans. R. Soc. Lond. A 362, 2477 (2004). 10.1098/rsta.2004.1452
- (2004) Philos. Trans. R. Soc. Lond. A , vol.362 , pp. 2477
- Ferrari, A.C.¹ Robertson, J.²

30
- 0038208253
- 10.1103/PhysRevB.67.155306
- A. C. Ferrari, S. E. Rodil, and J. Robertson, Phys. Rev. B 67, 155306 (2003). 10.1103/PhysRevB.67.155306
- (2003) Phys. Rev. B , vol.67 , pp. 155306
- Ferrari, A.C.¹ Rodil, S.E.² Robertson, J.³

31
- 25144469764
- 10.1002/adem.200500006
- G. Irmer and A. D. Reisel, Adv. Eng. Mater. 7, 694 (2005). 10.1002/adem.200500006
- (2005) Adv. Eng. Mater. , vol.7 , pp. 694
- Irmer, G.¹ Reisel, A.D.²

32
- 70350570507
- 10.1016/j.ijrmhm.2009.08.003
- C. A. Charitidis, Int. J. Refract. Met. 28, 51 (2010). 10.1016/j.ijrmhm.2009.08.003
- (2010) Int. J. Refract. Met. , vol.28 , pp. 51
- Charitidis, C.A.¹

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