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Volumn 134, Issue 1, 2012, Pages 7-12

Role of ex-situ oxygen plasma treatments on the mechanical and optical properties of diamond-like carbon thin films

Author keywords

FTIR; Mechanical properties; Optical properties; Plasma assisted CVD; Thin films

Indexed keywords

AUTOMOBILE PARTS; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON THIN FILMS; DLC FILM; EX SITU; FTIR; MAGNETIC STORAGE MEDIA; MAXIMUM HARDNESS; OXYGEN PLASMA TREATMENTS; OXYGEN PLASMAS; SELF-BIAS; SUPERHARDNESS;

EID: 84862778345     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2012.02.050     Document Type: Article
Times cited : (18)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.