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Volumn 134, Issue 1, 2012, Pages 7-12
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Role of ex-situ oxygen plasma treatments on the mechanical and optical properties of diamond-like carbon thin films
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Author keywords
FTIR; Mechanical properties; Optical properties; Plasma assisted CVD; Thin films
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Indexed keywords
AUTOMOBILE PARTS;
DIAMOND-LIKE CARBON;
DIAMOND-LIKE CARBON THIN FILMS;
DLC FILM;
EX SITU;
FTIR;
MAGNETIC STORAGE MEDIA;
MAXIMUM HARDNESS;
OXYGEN PLASMA TREATMENTS;
OXYGEN PLASMAS;
SELF-BIAS;
SUPERHARDNESS;
MAGNETIC STORAGE;
OPTICAL PROPERTIES;
OXYGEN;
PLASMA CVD;
PROTECTIVE COATINGS;
THIN FILMS;
MECHANICAL PROPERTIES;
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EID: 84862778345
PISSN: 02540584
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matchemphys.2012.02.050 Document Type: Article |
Times cited : (18)
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References (24)
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