Characterization studies of diamond-like carbon films grown using a saddle-field fast-atom-beam source

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 5, 2000, Pages 2302-2311

  Sarangi, D ^a   Panwar, O S ^b   Kumar, S ^b   Bhattacharyya, R ^b  

^a INSTITUT DES MATÉRIAUX JEAN ROUXEL   (France)

^b NATIONAL PHYSICAL LABORATORY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC BEAMS; AUGER ELECTRON SPECTROSCOPY; COMPOSITION EFFECTS; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

PHOTOTHERMAL DEFLECTION SPECTROSCOPY (PDS); SADDLE FIELD FAST ATOM BEAM SOURCE;

DIAMOND FILMS;

EID: 0034275677     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1289699     Document Type: Article

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