Optical monitoring and control of three-stage coevaporated Cu(In 1-x Gax)Se 2 by real-time spectroscopic ellipsometry

IEEE Journal of Photovoltaics

Volumn 3, Issue 1, 2013, Pages 375-380

  Attygalle, Dinesh ^a   Ranjan, Vikash ^b   Aryal, Puruswottam ^a   Pradhan, Puja ^a   Marsillac, Sylvain ^b   Podraza, Nikolas J ^a   Collins, Robert W ^a  

^a UNIVERSITY OF TOLEDO   (United States)

^b Old Dominion University   (United States)

Author keywords

Ellipsometry; monitoring; optical variables measurement; photovoltaic (PV) cells; process control; semiconductor film; thickness measurement

Indexed keywords

CELL CONFIGURATIONS; CO-EVAPORATED; CO-EVAPORATIONS; COPPER INDIUM GALLIUM DISELENIDE; CRYSTAL SILICON; DIRECT CONTROL; GLASS SUBSTRATES; HIGH VACUUM; IN-SITU MONITORING; OPTICAL MONITORING; PHOTOVOLTAIC; PHOTOVOLTAIC DEVICES; REAL TIME SPECTROSCOPIC ELLIPSOMETRY; SEMICONDUCTOR FILMS; SUBSTRATE HEATERS; THREE-STAGE PROCESS; TRANSITION TIME;

ELLIPSOMETRY; GALLIUM; INDIUM; MONITORING; OPTICAL VARIABLES MEASUREMENT; PROCESS CONTROL; SELENIUM COMPOUNDS; SPECTROSCOPIC ELLIPSOMETRY; SUBSTRATES; SURFACE ROUGHNESS; THICKNESS MEASUREMENT;

COPPER;

EID: 84871769753     PISSN: 21563381     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPHOTOV.2012.2220122     Document Type: Article

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