Real time composition monitoring methods in physical vapor deposition of Cu(In,Ga)Se2 thin films

Materials Research Society Symposium - Proceedings

Volumn 426, Issue , 1996, Pages 267-278

  Negami, Takayuki ^a   Nishitani, Mikihiko ^a   Kohara, Naoki ^a   Hashimoto, Yasuhiro ^a   Wada, Takahiro ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; COPPER COMPOUNDS; FILM PREPARATION; INFRARED TRANSMISSION; LIGHT ABSORPTION; LIGHT REFLECTION; SOLAR CELLS; STOICHIOMETRY; TEMPERATURE MEASUREMENT; THIN FILMS; VAPOR DEPOSITION;

COPPER INDIUM GALLIUM DISELENIDE THIN FILMS; FREE CARRIER ABSORPTION; INCIDENT LIGHT; NEAR INFRARED (NIR) REFLECTANCE; NEAR INFRARED (NIR) TRANSMITTANCE; PHYSICAL VAPOR DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0030411049     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-426-267     Document Type: Conference Paper

References (13)