Liquid encapsulated electrostatic energy harvester for low-frequency vibrations

Journal of Intelligent Material Systems and Structures

Volumn 24, Issue 1, 2013, Pages 61-69

  Bu, Ling ^a,b   Wu, Xiaoming ^a,b   Wang, Xiaohong ^a,b   Liu, Litian ^a,b  

^a TSINGHUA UNIVERSITY   (China)

^b TSINGHUA NATIONAL LABORATORY FOR INFORMATION SCIENCE AND TECHNOLOGY   (China)

Author keywords

energy harvester; Liquid; low frequency vibration; polyvinylidene fluoride electrets

Indexed keywords

ELECTROSTATIC ENERGIES; ENERGY HARVESTER; FLOWING LIQUID; HORIZONTAL VIBRATION; LOW VISCOSITY; LOW-FREQUENCY VIBRATION; MAXIMUM OUTPUT; N ,N-DIMETHYLFORMAMIDE; N-METHYL-2-PYRROLIDONE; POLYVINYLIDENE FLUORIDES; RELATIVE PERMITTIVITY; RESONATING STRUCTURES; ROTARY MOTIONS;

DIMETHYLFORMAMIDE; ELECTRETS; ENERGY HARVESTING; GLYCEROL; PERMITTIVITY;

LIQUIDS;

EID: 84871657971     PISSN: 1045389X     EISSN: 15308138     Source Type: Journal    
DOI: 10.1177/1045389X12459590     Document Type: Article

References (35)

1. Aktakka EE, Peterson RL, Najafi K. A CMOS-compatible piezoelectric vibration energy scavenger based on the integration of bulk PZT films on silicon. Proceedings of international electron devices meeting (IEDM'10) ; 2010 San Francisco, CA ; 2010. 31.5.1.
2. Altena G, Hohlfeld D, Elfrink R, et al. Design, modeling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester. Proceedings of the 16th international conference on solid-state sensors, actuators, and microsystems (Transducers' 11) ; 2011 Beijing, China ; 2011. 739.
3. Andò B, Baglio S, Trigona C, et al. Nonlinear mechanism in MEMS devices for energy harvesting applications. Journal of Micromechanics and Microengineering. 2011 ; 20 (12). 125020 12
4. Bartsch U, Gaspar J, Paul O. Low-frequency two-dimensional resonators for vibrational micro energy harvesting. Journal of Micromechanics and Microengineering. 2010 ; 20 (3). 035016 12
5. Beeby SP, Torah RN, Tudor MJ, et al. A micro electromagnetic generator for vibration energy harvesting. Journal of Micromechanics and Microengineering. 2007 ; 17 (7). 1257-1265
6. Bird RB, Armstrong RC, Hassager O Dynamics of Polymeric Liquids, Fluid Mechanics. New York: Wiley ; 1977:
7. Bowers BJ, Arnold DP. Spherical, rolling magnet generators for passive energy harvesting from human motion. Journal of Micromechanics and Microengineering. 2009 ; 19 (9). 094008 7
8. Challa VR, Prasad MG, Fisher FT. Towards an autonomous self-tuning vibration energy harvesting device for wireless sensor network applications. Smart Materials and Structures. 2011 ; 20 (2). 025004 11
9. Choi DH, Han CH, Kim HD, et al. Electrostatic energy harvester for low-frequency vibration by human physical motions using liquid. Proceedings of PowerMEMS ; 2010 Leuven, Belgium ; 2010. 119.
10. Defosseux M, Allain M, Ivaldi P, et al. Highly efficient piezoelectric micro harvester for low level of acceleration fabricated with a CMOS compatible process. Proceedings of the 16th international conference on solid-state sensors, actuators, and microsystems (Transducers' 11) ; 2011 Beijing, China ; 2011. 1859.
11. Edamoto M, Suzuki Y, Kasagi N, et al. Low-resonant-frequency micro electret generator for energy harvesting application. Proceedings of the 22nd IEEE international conference on MEMS (MEMS'09) ; 2009 Sorrento, Italy ; 2009. 1059.
12. Edamoto M, Suzuki Y, Kasagi N. Electret-based energy harvesting device with parylene flexible springs. Proceedings of the 4th Asia Pacific conference on transducers and micro/nano technologies (APCOT 2008) ; 2008 Taiwan, China ; 2008. 1.
13. Elfrink R, Renaud M, Kamel TM, et al. Vacuum-packaged piezoelectric vibration energy harvesters: damping contributions and autonomy for a wireless sensor system. Journal of Micromechanics and Microengineering. 2010 ; 20 (10). 104001 7
14. Erturk A, Renno JM, Inman DJ. Modeling of piezoelectric energy harvesting from an L-shaped beam-mass structure with an application to UAVs. Journal of Intelligent Material Systems and Structures. 2009 ; 20 (5). 529-544
15. Ferrari M, Ferrari V, Guizzetti M, et al. Improved energy harvesting from wideband vibrations by nonlinear piezoelectric converters. Sensors and Actuators A: Physical. 2010 ; 162 (2). 425-431
16. Galchev T, Hanseup K, Najafi K. Micro power generator for harvesting low-frequency and nonperiodic vibrations. Journal of Microelectromechanical Systems. 2011 ; 20 (4). 852-866
17. Jeon YB, Sood R, Jeong JH, et al. MEMS power generator with transverse mode thin film PZT. Sensors and Actuators A: Physical. 2005 ; 122 (1). 16-22
18. Kim IH, Jung HJ, Lee BM, et al. Broadband energy-harvesting using a two-degree-of-freedom vibrating body. Applied Physics Letters. 2011 ; 98 (21). 214102 3
19. Lo HW, Tai YC. Parylene HT for electret generators. Proceedings of PowerMEMS (PowerMEMS 2007) ; 2007 Freiburg, Germany ; 2007. 57.
20. Lo HW, Tai YC. Parylene-based electret power generators. Journal of Micromechanics and Microengineering. 2008 ; 18 (10). 104006 8
21. Ly R, Rguiti M, D' Astorg S, et al. Modeling and characterization of piezoelectric cantilever bending sensor for energy harvesting. Sensors and Actuators A: Physical. 2011 ; 168 (1). 95-100
22. Mitcheson PD, Yeatman EM, Rao GK, et al. Energy harvesting from human and machine motion for wireless electronic devices. Proceedings of the IEEE. 2008 ; 96 (9). 1457-1486
23. Munson BR Fundamentals of Fluid Mechanics. New York: Wiley ; 2009:
24. Najafi K, Galchev T, Aktakka EE, et al. Microsystems for energy harvesting. Proceedings of the 16th international conference on solid-state sensors, actuators, and microsystems (Transducers' 11) ; 2011 Beijing, China ; 2011. 1845.
25. Naruse Y, Matsubara N, Mabuchi K, et al. Electrostatic micro power generation from low-frequency vibration such as human motion. Journal of Micromechanics and Microengineering. 2009 ; 19 (9). 094002 5
26. Priya S, Inman DJ Energy Harvesting Technologies. New York: Springer ; 2009:
27. Roundy S, Wright PK. A piezoelectric vibration based generator for wireless electronics. Smart Materials and Structures. 2004 ; 13 (5). 1131-1142
28. Shen D, Park JH, Noh JH, et al. Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting. Sensors and Actuators A: Physical. 2009 ; 154 (1). 103-108
29. Shen H, Qiu JH, Ji HL, et al. A low-power circuit for piezoelectric vibration control by synchronized switching on voltage sources. Sensors and Actuators A: Physical. 2010 ; 161 (1). 245-255
30. Shen H, Qiu J, Balsi M. Vibration damping as a result of piezoelectric energy harvesting. Sensors and Actuators A: Physical. 2011 ; 169 (1). 178-186
31. Suzuki Y. Recent progress in MEMS electret generator for energy harvesting. IEEJ Transactions on Electrical and Electronic Engineering. 2011 ; 6 (2). 101-111
32. Suzuki Y, Tai YC. Micromachined high-aspect-ratio parylene spring and its application to low-frequency accelerometers. Journal of Microelectromechanical Systems. 2006 ; 15 (5). 1364-1370
33. Suzuki Y, Miki D, Edamoto M, et al. A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications. Journal of Micromechanics and Microengineering. 2010 ; 20 (10). 104002 8
34. Von Buren T, Troster G. Design and optimization of a linear vibration-driven electromagnetic micro-power generator. Sensors and Actuators A: Physical. 2007 ; 135 (2). 765-775
35. Vullers RJM, van Schaijk R, Doms I, et al. Micropower energy harvesting. Solid-State Electronics. 2009 ; 53 (7). 684-693