Highly efficient piezoelectric micro harvester for low level of acceleration fabricated with a CMOS compatible process

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1859-1862

  Defosseux, M ^a   Allain, M ^a   Ivaldi, P ^b   Defay, E ^b   Basrour, S ^a  

^a CNRS   (France)

^b CEA LETI   (France)

Author keywords

AlN; energy harvesting; Piezoelectricity

Indexed keywords

ALN; CMOS COMPATIBLE; LOW LEVEL; NEW RESULTS; PIEZOELECTRIC HARVESTER;

ALUMINUM NITRIDE; CRYSTALLOGRAPHY; HARVESTERS; MICROSYSTEMS; NITRIDES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; TRANSDUCERS; VACUUM;

SOLID-STATE SENSORS;

EID: 80052113229     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969866     Document Type: Conference Paper

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