A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications

Journal of Micromechanics and Microengineering

Volumn 20, Issue 10, 2010, Pages

  Suzuki, Yuji ^a   Miki, Daigo ^a   Edamoto, Masato ^a   Honzumi, Makoto ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-GAPS; CONTROL METHODS; DAMPING FORCES; ELECTRODE ARRANGEMENT; ELECTROMECHANICAL MODELS; ELECTROSTATIC LEVITATION; GAP-SPACING; GENERATOR APPLICATIONS; IN-PLANE; OUT-OF-PLANE; POLYMER MATERIALS; REPULSIVE ELECTROSTATIC FORCE; REPULSIVE FORCES; TOTAL POWER;

ELECTRETS; ELECTROSTATIC FORCE; ENERGY HARVESTING;

ELECTROSTATIC GENERATORS;

EID: 78049441684     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/10/104002     Document Type: Article

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