Design, modeling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 739-742

  Altena, G ^a   Hohlfeld, D ^b   Elfrink, R ^a   Goedbloed, M H ^a   Van Schaijk, R ^a  

^a HOLST CENTRE   (Netherlands)

^b REUTLINGEN UNIVERSITY   (Germany)

Author keywords

Electret; Electrostatic; Energy harvester; MEMS; SABER; Scavenging; Variable capacitor; Vibration generation

Indexed keywords

ELECTROMECHANICAL MODELS; ELECTROSTATIC ENERGIES; ENERGY HARVESTER; OUTPUT CURRENT; PROCESS FLOWS; SABER; SELF-ALIGNED ELECTRODES; SOI WAFERS; VARIABLE CAPACITOR; VIBRATION GENERATION;

ACTUATORS; CAPACITORS; ELECTRETS; ELECTROSTATIC ACTUATORS; ELECTROSTATIC FORCE; FABRICATION; HARVESTERS; MICROSYSTEMS; SOLID-STATE SENSORS;

ENERGY HARVESTING;

EID: 80052136749     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969847     Document Type: Conference Paper

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