A CMOS-compatible piezoelectric vibration energy scavenger based on the integration of bulk PZT films on silicon

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2010, Pages

  Aktakka, Ethem Erkan ^a   Peterson, Rebecca L ^a   Najafi, Khalil ^a  

^a University of Michigan   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE VOLUMES; CHEMICAL PATTERNING; CMOS COMPATIBLE; DEVICE PERFORMANCE; FABRICATED DEVICE; HIGH OUTPUT; MICRO-SCALES; OUTPUT VOLTAGES; PIEZOELECTRIC FILM; PIEZOELECTRIC PROPERTY; PIEZOELECTRIC THIN FILMS; PIEZOELECTRIC VIBRATION; POWER DENSITIES; POWER GENERATORS; PROOF MASS; PZT; PZT FILM; PZT MATERIALS; WAFER LEVEL;

DEPOSITION; ELECTRIC IMPEDANCE; ELECTRIC RECTIFIERS; ELECTRON DEVICES; FABRICATION; HARVESTERS; INTEGRATION; PIEZOELECTRIC CERAMICS; SILICON WAFERS;

PIEZOELECTRICITY;

EID: 79951826961     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2010.5703459     Document Type: Conference Paper

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