The heuristic preemptive dispatching method of material transportation system in 300mm semiconductor fabrication

Journal of Intelligent Manufacturing

Volumn 23, Issue 5, 2012, Pages 2047-2056

  Wang, Chia Nan ^a   Chen, Li Chin ^a  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

300mm; AMHS; OHT; Preemptive; Semiconductor manufacturing

Indexed keywords

300MM; AMHS; OHT; PREEMPTIVE; SEMICONDUCTOR MANUFACTURING;

COMPETITION; EMERGENCY TRAFFIC CONTROL; LOADING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; TRAFFIC CONGESTION; UNLOADING;

HEURISTIC METHODS;

EID: 84870884956     PISSN: 09565515     EISSN: 15728145     Source Type: Journal    
DOI: 10.1007/s10845-011-0531-7     Document Type: Article

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