Differentiated preemptive dispatching for automatic materials handling services in 300 mm semiconductor foundry

International Journal of Advanced Manufacturing Technology

Volumn 29, Issue 9-10, 2006, Pages 890-896

  Liao, Da Yin ^a   Wang, Chia Nan ^b  

^a NATIONAL CHI NAN UNIVERSITY   (Taiwan)

^b YUANPEI UNIVERSITY   (Taiwan)

Author keywords

300 mm; AMHS; Hot lot; OHT; Semiconductor manufacturing

Indexed keywords

COMPUTER SIMULATION; FOUNDRIES; NUMERICAL ANALYSIS; OPTIMIZATION; PRODUCTIVITY; SCHEDULING; TRANSPORTATION;

300 MM SEMICONDUCTOR FOUNDRY; AMHS; HOT LOT; OHT; SEMICONDUCTOR MANUFACTURING;

SEMICONDUCTOR MATERIALS;

EID: 33746911598     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-005-2610-4     Document Type: Article

References (16)

1. Bader U, Dorner J, Schlieber J, Kaufmann T, Garbers M (1998) Cost efficient future automation and transport concepts. Proc 7th IEEE International Symposium on Semiconductor Manufacturing, pp 57-60
2. Pillai D, Srinivasan S (1997) Material handling automation - trends, vision, and future plans. Proc IEEE/SEMI International Symposium on Semiconductor Manufacturing, pp 251-254
3. Ehteshami B, Petrakian RB, Shabe PM (1992) Trade-offs in cycle time management: hot lots. IEEE Trans Semicond Manuf 5:101-106
4. Bahri N, Reiss J, Doherty B (2001) Comparison of unified vs. segregated automated material handling. Proc IEEE International Symposium on Semiconductor Manufacturing, pp 3-6
5. Subramaniam B, Kryder DK (1997) Automation challenges in the next generation semiconductor factory. Proc IEEE/SEMI advanced semiconductor manufacturing conference, pp 349-355
6. Weckman J (1998) 300 mm fab/AMHS layout challenge: a cookbook approach. Proc 7th IEEE International Symposiums on Semiconductor Manufacturing, pp 61-64
7. Pillai D, Quinn T, Kryder K, Chanson D (1999) Integration of 300mm fab layouts and material handling automation. Proc 1999 IEEE International Symposium on Semiconductor Manufacturing, pp 23-26
8. Cardarelli G, Pelagagge PM (1995) Simulation tool for design and management optimization of automated interbay material handling and storage systems for large wafer fab. IEEE Trans Semicond Manuf 8:44-49
9. Liao D-Y, Fu H-S (2004) Dynamic OHT allocation and dispatching in large-scale, 300-mm AMHS management. IEEE Robot Automat Mag 11(3):22-32
10. Kuo C-H (2002) Modeling and performance evaluation of an overhead hoist transport system in a 300 mm fabrication plant. Int J Adv Manuf Technol 14:153-161
11. Lin JT, Wang FK, Wu CK (2003) Connecting transport AMHS in a wafer fab. Int J Prod Res 41:529-544
12. Fronckowiak D, Peikert A, Nishinohara K (1996) Using discrete event simulator to analyze the impact of job priorities on cycle time in semiconductor manufacturing. Proc IEEE/SEMI Advanced Semiconductor Manufacturing Conferences and Workshop, pp 151-155
13. Narahari Y, Khan LM (1997) Modeling the effect of hot lots in semiconductor manufacturing systems. IEEE Trans Semicond Manuf 10:185-188
14. Wang C-N, Liao D-Y (2003) Effective OHT dispatching for differentiated material handling services in 300mm wafer foundry. Proc International Conference of Robotics and Automations 2003, Taipei, Taiwan
15. Egbulu PJ, Tanchoco JMA (1984) Characterization of automatic guided vehicle dispatching rules. Int J Prod Res 22:359-374
16. Ting J-H, Tanchoco JMA (2000) Unidirectional circular layout for overhead material handling systems. Int J Prod Res 38:3913-3935