Dynamic OHT allocation and dispatching in large-scaled 300mm AMHS management

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 4, Issue , 2002, Pages 3630-3635

  Liao, Da Yin ^a   Fu, Hsien Sheng ^a  

^a NATIONAL CHI NAN UNIVERSITY   (Taiwan)

Author keywords

300mm AMHS management; Discrete event simulation; OHT allocation and dispatching

Indexed keywords

COMPUTER SIMULATION; FACTORY AUTOMATION; MATERIALS HANDLING; MATERIALS HANDLING EQUIPMENT; PRODUCTIVITY; RESOURCE ALLOCATION; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; THROUGHPUT;

AUTOMATIC MATERIAL HANDLING SYSTEM; DISCRETE-EVENT SIMULATION; DISPATCHING; OVERHEAD HOIST TRANSPORT;

ROBOTICS;

EID: 0036058536     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. Cost efficient future automation and transport concepts
2. Simulation tool for design and management optimization of automated interbay material handling and storage systems for large wafer fab
3. An effective OHT dispatching policy for 300mm AMHS management
4. Low cost and short lead time AMHS design using interbay/intrabay diverging and converging method for 300mm fab
5. Material handling automation - Trends, vision, and future plans
6. Integration of 300mm fab layouts and material handling automation
7. Automation challenges in the next generation semiconductor factory
8. 300mm Fab/AMHS layout challenge: A cookbook approach