Two-step simulation method for automatic material handling system of semiconductor fab

Robotics and Computer-Integrated Manufacturing

Volumn 23, Issue 4, 2007, Pages 409-420

  Kong, Sang Hoon ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

AMHS; Automated material handling system; OHS; OHT; Semiconductor; Simulation

Indexed keywords

AUTOMATION; COMPUTER SIMULATION; COMPUTER SOFTWARE; MATHEMATICAL MODELS; MICROFABRICATION; PARAMETER ESTIMATION;

AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS); PRODUCTION SIMULATION; SAMSUNG ELECTRONICS (CO); SIMULATION MODELS;

MATERIALS HANDLING;

EID: 33947584391     PISSN: 07365845     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.rcim.2006.05.004     Document Type: Article

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