A hybrid push/pull-dispatching rule for a photobay in a 300 mm wafer fab

Robotics and Computer-Integrated Manufacturing

Volumn 22, Issue 1, 2006, Pages 47-55

  Lin, J T ^a   Wang, F K ^b   Chang, Y M ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Hybrid push pull; Photobay; Simulation

Indexed keywords

AUTOMATION; COMPUTER SIMULATION; DISCRETE TIME CONTROL SYSTEMS;

AUTOMATED MATERIAL HANDLING SYSTEM (AMHS); HYBRID PUSH/PULL; PHOTOBAY;

MATERIALS HANDLING;

EID: 27144534254     PISSN: 07365845     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.rcim.2005.02.003     Document Type: Article

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