Determination of irradiation parameters for laser-induced periodic surface structures

Applied Surface Science

Volumn 264, Issue , 2013, Pages 79-87

  Eichstadt J ^a   Romer G R B E ^a   Huis In 'T Veld, A J ^a,b  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b TNO   (Netherlands)

Author keywords

Accumulated fluence; Extended areas; Laser surface structuring; Laser induced periodic surface structures (LIPSS); Silicon

Indexed keywords

IRRADIATION; SILICON; SURFACE STRUCTURE;

EXPERIMENTAL APPROACHES; EXTENDED AREAS; FLUENCES; LASER SURFACE; LASER-INDUCED PERIODIC SURFACE STRUCTURES; PULSE REPETITION FREQUENCIES; SINGLE CRYSTALLINE SILICON; SURFACE FUNCTIONALIZATION;

PERIODIC STRUCTURES;

EID: 84870553395     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.09.120     Document Type: Article

References (40)

1. J.E. Sipe, J.F. Young, J.S. Preston, and H.M. van Driel Laser-induced periodic surface structure. I. Theory Physical Review B 27 1983 1141
2. Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, and K. Wang Femtosecond laser-induced periodic surface structure on diamond film Applied Physics Letters 82 2003 1703 1705
3. D. Dufft, A. Rosenfeld, S.K. Das, R. Grunwald, and J. Bonse Femtosecond laser-induced periodic surface structures revisited: a comparative study on ZnO Journal of Applied Physics 105 2009 034908 034909
4. J. Bonse, A. Rosenfeld, and J. Krüger On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses Journal of Applied Physics 106 2009 104910 104915
5. J.F. Young, J.S. Preston, H.M. van Driel, and J.E. Sipe Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass Physical Review B 27 1983 1155
6. F. Costache, M. Henyk, and J. Reif Surface patterning on insulators upon femtosecond laser ablation Applied Surface Science 208-209 2003 486 491
7. J. Bonse, and J. Krüger Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon Journal of Applied Physics 108 2010 034903 034905
8. M. Birnbaum Semiconductor surface damage produced by ruby lasers Journal of Applied Physics 36 1965 3688 3689
9. A. Borowiec, and H.K. Haugen Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses Applied Physics Letters 82 2003 4462 4464
10. D.C. Emmony, R.P. Howson, and L.J. Willis Laser mirror damage in germanium at 10.6 μm Applied Physics Letters 23 1973 598 600
11. H.M. van Driel, J.E. Sipe, and J.F. Young Laser-induced periodic surface structure on solids: A universal phenomenon Physical Review Letters 49 1982 1955
12. J. Reif, F. Costache, M. Henyk, and S.V. Pandelov Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics Applied Surface Science 197-198 2002 891 895
13. A. Mizuno, T. Honda, J. Kikuchi, Y. Iwai, N. Yasumaru, and K. Miyazaki Friction properties of the DLC film with periodic structures in nano-scale Tribology Online 1 2006 44 48
14. N. Yasumaru, K. Miyazaki, and J. Kiuchi Control of tribological properties of diamond-like carbon films with femtosecond-laser-induced nanostructuring Applied Surface Science 254 2008 2364 2368
15. J. Yao, C. Zhang, H. Liu, Q. Dai, L. Wu, S. Lan, A.V. Gopal, V.A. Trofimov, and T.M. Lysak Selective appearance of several laser-induced periodic surface structure patterns on a metal surface using structural colors produced by femtosecond laser pulses Applied Surface Science 258 2012 7625 7632
16. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu Large area uniform nanostructures fabricated by direct femtosecond laser ablation Optics Express 16 2008 19354 19365
17. S.E. Clark, and D.C. Emmony Ultraviolet-laser-induced periodic surface structures Physical Review B 40 1989 2031
18. N.C. Kerr, S.E. Clark, and D.C. Emmony High resolution imaging studies into the formation of laser-induced periodic surface structures Applied Optics 28 1989 3718 3724
19. R. Ganeev Formation of different periodic nanostructures on semiconductors Optics and Spectroscopy 106 2009 142 146
20. P.M. Fauchet, and A.E. Siegman Surface ripples on silicon and gallium arsenide under picosecond laser illumination Applied Physics Letters 40 1982 824 826
21. Z. Guosheng, P.M. Fauchet, and A.E. Siegman Growth of spontaneous periodic surface structures on solids during laser illumination Physical Review B 26 1982 5366
22. M. Bolle, and S. Lazare Large scale excimer laser production of submicron periodic structures on polymer surfaces Applied Surface Science 69 1993 31 37
23. R. Wagner, J. Gottmann, A. Horn, and E.W. Kreutz Subwavelength ripple formation induced by tightly focused femtosecond laser radiation Applied Surface Science 252 2006 8576 8579
24. R. Wagner, and J. Gottmann Sub-wavelength ripple formation on various materials induced by tightly focused femtosecond laser radiation Journal of Physics: Conference Series 59 2007 333
25. 2 with femtosecond laser pulses at 400 nm using a line focus Nanotechnology 21 2010 155302
26. J. Eichstädt, G.R.B.E. Römer, and A.J. Huis in 't Veld Towards friction control using laser-induced periodic surface structures Physics Procedia 12 Part B 2011 7 15
27. K. Vogel, and P. Backlund Application of electron and optical microscopy in studying laser-irradiated metal surfaces Journal of Applied Physics 36 1965 3697 3701
28. Y. Jee, M.F. Becker, and R.M. Walser Laser-induced damage on single-crystal metal surfaces Journal of the Optical Society of America B: Optical Physics 5 1988 648 659
29. J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner Femtosecond laser ablation of silicon modification thresholds and morphology Applied Physics A: Materials Science & Processing 74 2002 19 25
30. J.M. Liu Simple technique for measurements of pulsed Gaussian-beam spot sizes Optics Letters 7 1982 196 198
31. J. Krüger, D. Dufft, R. Koter, and A. Hertwig Femtosecond laser-induced damage of gold films Applied Surface Science 253 2007 7815 7819
32. S.S. Wellershoff, J. Hohlfeld, J. Güdde, and E. Matthias The role of electron-phonon coupling in femtosecond laser damage of metals Applied Physics A: Materials Science & Processing 69 1999 99 107
33. J. Bonse, J.M. Wrobel, J. Krüger, and W. Kautek Ultrashort-pulse laser ablation of indium phosphide in air Applied Physics A: Materials Science & Processing 72 2001 89 94
34. S. Baudach, J. Bonse, and W. Kautek Ablation experiments on polyimide with femtosecond laser pulses Applied Physics A: Materials Science & Processing 69 1999 S395 S398
35. J. Bonse, P. Rudolph, J. Krüger, S. Baudach, and W. Kautek Femtosecond pulse laser processing of TiN on silicon Applied Surface Science 154-155 2000 659 663
36. J. Bonse, H. Sturm, D. Schmidt, and W. Kautek Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air Applied Physics A: Materials Science & Processing 71 2000 657 665
37. A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi Ultrashort-laser- pulse damage threshold of transparent materials and the role of incubation Applied Physics A: Materials Science & Processing 69 1999 373 376
38. D. Ashkenasi, A. Rosenfeld, and R. Stoian Laser-induced incubation in transparent materials and possible consequences for surface and bulk microstructuring with ultrashort pulses SPIE 4633 2002 90 98
39. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser ACS Nano 3 2009 4062 4070
40. J. Bonse, M. Munz, and H. Sturm Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses Journal of Applied Physics 97 2005 013538 013539