Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air

Applied Physics A: Materials Science and Processing

Volumn 71, Issue 6, 2000, Pages 657-665

  Bonse, J ^a   Sturm, H ^a   Schmidt, D ^a   Kautek, W ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; ATOMIC FORCE MICROSCOPY; ELECTRON SPECTROSCOPY; LASER ABLATION; MORPHOLOGY; OPTICAL MICROSCOPY; PULSED LASER APPLICATIONS; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

DYNAMIC FRICTION ATOMIC FORCE MICROSCOPY; LASER PULSE NUMBERS; SMALL-SPOT ELECTRON SPECTROSCOPY;

TITANIUM NITRIDE;

EID: 0034509074     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390000585     Document Type: Article

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