Towards friction control using laser-induced periodic Surface Structures

Physics Procedia

Volumn 12, Issue PART 2, 2011, Pages 7-15

  Eichstat J ^a   Romer G R B E ^a   Huis in't Veld, A J ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Friction; High precision contact mechanics; Laser Surface Texturing; Laser induced periodic surface structures; Nanostructures; Tribology; Wafer chucks

Indexed keywords

DEFORMATION; FRICTION; MANUFACTURE; NANOSTRUCTURES; SURFACE STRUCTURE; TRIBOLOGY;

CONTACT MECHANICS; FRICTION CONTROL; LASER PARAMETERS; LASER SURFACE TEXTURING; LASER-INDUCED PERIODIC SURFACE STRUCTURES; STATIC EXPERIMENTS; TRIBOLOGICAL PROPERTIES; WAFER CHUCK;

PERIODIC STRUCTURES;

EID: 79959440145     PISSN: 18753884     EISSN: 18753892     Source Type: Conference Proceeding    
DOI: 10.1016/j.phpro.2011.03.099     Document Type: Conference Paper

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