Continuous and scalable fabrication of flexible metamaterial films via roll-to-roll nanoimprint process for broadband plasmonic infrared filters

Applied Physics Letters

Volumn 101, Issue 22, 2012, Pages

  Ok, Jong G ^a   Seok Youn, Hong ^a   Kyu Kwak, Moon ^a,c   Lee, Kyu Tae ^a   Jae Shin, Young ^a   Jay Guo, L ^a   Greenwald, Anton ^b   Liu, Yisi ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b Agiltron   (United States)

^c Kyungpook National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT ENVIRONMENT; DUAL-BAND; FILTERING PERFORMANCE; FLEXIBLE SUBSTRATE; HIGH-THROUGHPUT; INFRARED FILTERS; METAL DISK; METAL-INSULATOR-METAL STRUCTURES; NANOIMPRINT PROCESS; PHOTONIC APPLICATION; PLASMONIC; PLASMONIC METAMATERIALS; ROLL TO ROLL; SIMULATION ANALYSIS; SUB-WAVELENGTH; SUBMICRON;

INFRARED DETECTORS; METAMATERIALS; NANOIMPRINT LITHOGRAPHY; PLASMONS;

FABRICATION;

EID: 84870496790     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4767995     Document Type: Article

References (28)

1. J. J. Wang, F. Walters, X. M. Liu, P. Sciortino, and X. G. Deng, Appl. Phys. Lett. 90 (6), 061104 (2007) 10.1063/1.2437731;
2. Y. J. Shin, C. Pina-Hernandez, Y.-K. Wu, J. G. Ok, and L. J. Guo, Nanotechnology 23 (34), 344018 (2012). 10.1088/0957-4484/23/34/344018
3. T. Xu, Y. K. Wu, X. G. Luo, and L. J. Guo, Nat. Commun. 1, 59 (2010);
4. H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, ACS Nano 5 (9), 7055 (2011). 10.1021/nn201767e
5. T. Xu, H. F. Shi, Y. K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, Small 7 (22), 3128 (2011). 10.1002/smll.201101068
6. M. J. Preiner, K. T. Shimizu, J. S. White, and N. A. Melosh, Appl. Phys. Lett. 92 (11), 113109 (2008) 10.1063/1.2898509;
7. Y. T. Chang, Y. T. Wu, J. H. Lee, H. H. Chen, C. Y. Hsueh, H. F. Huang, Y. W. Jiang, P. E. Chang, and S. C. Lee, Appl. Phys. Lett. 95 (21), 213102 (2009) 10.1063/1.3266868.
8. I. Puscasu and W. L. Schaich, Appl. Phys. Lett. 92 (23), 233102 (2008) 10.1063/1.2938716.
9. C. M. Wang, Y. C. Chang, M. W. Tsai, Y. H. Ye, C. Y. Chen, Y. W. Jiang, S. C. Lee, and D. P. Tsai, IEEE Photon. Technol. Lett. 20 (13-16), 1103 (2008). 10.1109/LPT.2008.924320
10. C. W. Cheng, M. N. Abbas, Z. C. Chang, M. H. Shih, C. M. Wang, M. C. Wu, and Y. C. Chang, Opt. Lett. 36 (8), 1440 (2011). 10.1364/OL.36.001440
11. C. Koechlin, P. Bouchon, F. Pardo, J. Jaeck, X. Lafosse, J. L. Pelouard, and R. Haidar, Appl. Phys. Lett. 99 (24), 241104 (2011). 10.1063/1.3670051
12. P. Bouchon, C. Koechlin, F. Pardo, R. Haidar, and J. L. Pelouard, Opt. Lett. 37 (6), 1038 (2012). 10.1364/OL.37.001038
13. N. Liu, T. Weiss, M. Mesch, L. Langguth, U. Eigenthaler, M. Hirscher, C. Sonnichsen, and H. Giessen, Nano Lett. 10 (4), 1103 (2010). 10.1021/nl902621d
14. N. Liu, M. Mesch, T. Weiss, M. Hentschel, and H. Giessen, Nano Lett. 10 (7), 2342 (2010). 10.1021/nl9041033
15. J. M. Hao, J. Wang, X. L. Liu, W. J. Padilla, L. Zhou, and M. Qiu, Appl. Phys. Lett. 96 (25), 251104 (2010) 10.1063/1.3442904.
16. T. Maier and H. Bruckl, Opt. Lett. 34 (19), 3012 (2009); 10.1364/OL.34.003012
17. T. Maier and H. Brueckl, Opt. Lett. 35 (22), 3766 (2010). 10.1364/OL.35.003766
18. L. J. Guo, Adv. Mater. 19 (4), 495 (2007). 10.1002/adma.200600882
19. S. H. Ahn, J. S. Kim, and L. J. Guo, J. Vac. Sci. Technol. B 25 (6), 2388 (2007). 10.1116/1.2798747
20. S. H. Ahn and L. J. Guo, Adv. Mater. 20 (11), 2044 (2008). 10.1002/adma.200702650
21. S. H. Ahn and L. J. Guo, ACS Nano 3 (8), 2304 (2009). 10.1021/nn9003633
22. A. Greenwald, J. Ryu, Y. Liu, R. Biswas, J. G. Ok, H. S. Youn, M. K. Kwak, M.-G. Kang, and L. J. Guo, Mater. Res. Soc. Symp. Proc. 1412, FF1.4 (2012). 10.1557/opl.2012.974
23. C. Pina-Hernandez, L. J. Guo, and P. F. Fu, ACS Nano 4 (8), 4776 (2010). 10.1021/nn100478a
24. T. Ling, S. L. Chen, and L. J. Guo, Appl. Phys. Lett. 98 (20), 204103 (2011) 10.1063/1.3589971.
25. K. Y. Suh, J. Park, and H. H. Lee, J. Chem. Phys. 116 (17), 7714 (2002). 10.1063/1.1467898
26. M. K. Kwak, J. G. Ok, J. Y. Lee, and L. J. Guo, Nanotechnology 23 (34), 344008 (2012). 10.1088/0957-4484/23/34/344008
27. C. Pina-Hernandez, P. F. Fu, and L. J. Guo, J. Vac. Sci. Technol. B 26 (6), 2426 (2008). 10.1116/1.2987966
28. C. M. Bingham, H. Tao, X. L. Liu, R. D. Averitt, X. Zhang, and W. J. Padilla, Opt. Express 16 (23), 18565 (2008). 10.1364/OE.16.018565