High-performance, large area, deep ultraviolet to infrared polarizers based on 40 nm line/78 nm space nanowire grids

Applied Physics Letters

Volumn 90, Issue 6, 2007, Pages

  Wang, Jian Jim ^a   Walters, Frank ^a   Liu, Xiaoming ^a   Sciortino, Paul ^a   Deng, Xuegong ^a  

^a NanoOpto Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMMERSION INTERFERENCE; POLARIZERS; SEMICONDUCTOR LITHOGRAPHY; ULTRAVIOLET WAVELENGTH;

LIGHT POLARIZATION; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; WAVE INTERFERENCE; WSI CIRCUITS;

OPTICAL SYSTEMS;

EID: 33846978727     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2437731     Document Type: Article

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