Formation of periodic nanoripples on silicon and germanium induced by femtosecond laser pulses

Physics Procedia

Volumn 12, Issue PART 2, 2011, Pages 29-36

  Le Harzic, R ^a   Dorr D ^a   Sauer, D ^a   Neumeier, M ^b   Epple, M ^b   Zimmermann, H ^a   Stracke, F ^a  

^a FRAUNHOFER INSTITUTE FOR BIOMEDICAL ENGINEERING   (Germany)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Femtosecond laser; Germanium; HSFL; Ripples; Silicon

Indexed keywords

GERMANIUM; HARMONIC GENERATION; LASER PULSES; MANUFACTURE; NONLINEAR OPTICS; PULSE REPETITION RATE; SILICON; ULTRAFAST LASERS;

HIGH REPETITION RATE; HIGH SPATIAL FREQUENCY; HSFL; LASER PROCESS; NANO-RIPPLES; RIPPLES; SURFACE AREA;

ULTRASHORT PULSES;

EID: 79959415721     PISSN: 18753884     EISSN: 18753892     Source Type: Conference Proceeding    
DOI: 10.1016/j.phpro.2011.03.102     Document Type: Conference Paper

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