Ultra-short pulsed laser PDMS thin-layer separation and micro-fabrication

Journal of Micromechanics and Microengineering

Volumn 19, Issue 5, 2009, Pages

  Huang, Huan ^a   Guo, Zhixiong ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION LINES; ABLATION SURFACES; ABLATION THRESHOLDS; ACCUMULATION EFFECTS; DEPTH OF FOCUS; INFRARED WAVELENGTHS; INTERCONNECTED NETWORK; IRRADIATION PULSE ENERGY; KEY FACTORS; POLYDIMETHYLSILOXANE PDMS; PULSE OVERLAP; PULSE WIDTH; SEM IMAGE; SHORT-PULSED LASER; SINGLE-PULSE IRRADIATION; THERMAL DAMAGE; THICKNESS FLUCTUATIONS; THIN LAYERS;

ABLATION; FABRICATION; IRRADIATION; MICROCHANNELS; PHOTORESISTS; SEPARATION; SILICONES; SURFACE ROUGHNESS;

PULSED LASER APPLICATIONS;

EID: 67849085079     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/5/055007     Document Type: Article

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