Three-dimensional residue-free volume removal inside sapphire by high-temperature etching after irradiation of femtosecond laser Pulses

Laser Chemistry

Volumn 2008, Issue , 2008, Pages

  Matsuo, Shigeki ^a   Tokumi, Kensuke ^a   Tomita, Takuro ^a   Hashimoto, Shuichi ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54549102221     PISSN: 02786273     EISSN: None     Source Type: Journal    
DOI: 10.1155/2008/892721     Document Type: Article

References (19)

1. Fan L.-S., Tai Y.-C., Muller R. S., Integrated movable micromechanical structures for sensors and actuators IEEE Transactions on Electron Devices 1988 35 6 724 730
2. Sun H.-B., Matsuo S., Misawa H., Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin Applied Physics Letters 1999 74 6 786 788
3. Kawata S., Sun H.-B., Tanaka T., Takada K., Finer features for functional microdevices Nature 2001 412 6848 697 698
4. Kondo Y., Qiu J., Mitsuyu T., Hirao K., Yoko T., Three-dimensional microdrilling of glass by multiphoton process and chemical etching Japanese Journal of Applied Physics 1999 38 10A L1146 L1148
5. Marcinkeviius A., Juodkazis S., Watanabe M., Femtosecond laser-assisted three-dimensional microfabrication in silica Optics Letters 2001 26 5 277 279
6. Taylor R. S., Hnatovsky C., Simova E., Ultra-high resolution index of refraction profiles of femtosecond laser modified silica structures Optics Express 2003 11 7 775 781
7. Bellouard Y., Said A., Dugan M., Bado P., Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching Optics Express 2004 12 10 2120 2129
8. Juodkazis S., Nishimura K., Misawa H., Control over the crystalline state of sapphire Advanced Materials 2006 18 11 1361 1364
9. Matsuo S., Tabuchi Y., Okada T., Juodkazis S., Misawa H., Femtosecond laser assisted etching of quartz: microstructuring from inside Applied Physics A 2006 84 1-2 99 102
10. Crunteanu A., Jnchen G., Hoffmann P., Three-dimensional structuring of sapphire by sequential He+ ion-beam implantation and wet chemical etching Applied Physics A 2003 76 7 1109 1112
11. Crunteanu A., Pollnau M., Jnchen G., Ti:sapphire rib channel waveguide fabricated by reactive ion etching of a planar waveguide Applied Physics B 2002 75 1 15 17
12. Grivas C., Shepherd D. P., May-Smith T. C., Performance of Ar+ -milled Ti: sapphire rib waveguides as single transverse-mode broadband fluorescence sources IEEE Journal of Quantum Electronics 2003 39 3 501 507
13. Wortmann D., Gottmann J., Brandt N., Horn-Solle H., Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching Optics Express 2008 16 3 1517 1522
14. Matsuo S., Shichijo Y., Tomita T., Hashimoto S., Laser fabrication of ship-in-a-bottle microstructures in sapphire Journal of Laser Micro/Nanoengineering 2007 2 2 114 116
15. Cheng Y., Sugioka K., Midorikawa K., Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing Optics Letters 2004 29 17 2007 2009
16. Wang Z., Sugioka K., Midorikawa K., Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing Applied Physics A 2007 89 4 951 955
17. Hanada Y., Sugioka K., Kawano H., Ishikawa I. S., Miyawaki A., Midorikawa K., Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass Biomedical Microdevices 2008 10 3 403 410
18. Matsuo S., Kiyama S., Shichijo Y., Laser microfabrication and rotation of ship-in-a-bottle optical rotators Applied Physics Letters 2008 93 5 3
19. Edwards P. L., Huang S., Comparison of whisker growth sites and dislocation etch pits on single-crystal sapphire Journal of the American Ceramic Society 1966 49 3 122 125