Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

Microsystem Technologies

Volumn 18, Issue 11, 2012, Pages 1761-1769

  Md Ralib, Aliza Aini ^a   Nordin, Anis Nurashikin ^a   Salleh, Hanim ^b   Othman, Raihan ^a  

^a INTERNATIONAL ISLAMIC UNIVERSITY MALAYSIA   (Malaysia)

^b Universiti Tenaga Nasional   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; AVAILABLE ENERGY DENSITY; CHEMICAL BATTERIES; CMOS COMPATIBLE; DEPOSITION METHODS; ELECTRONIC FUNCTIONALITY; ENERGY HARVESTER; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; FINITE ELEMENT MODELING; LOW POWER; LOW POWER WIRELESS; MATERIAL CHARACTERIZATIONS; OPEN-CIRCUIT OUTPUT VOLTAGES; OUTPUT VOLTAGES; PIEZOELECTRIC COUPLINGS; PIEZOELECTRIC MEMS; PIEZOELECTRIC THIN FILMS; POWER SOURCES; RESONANCE FREQUENCIES; RF-MAGNETRON SPUTTERING; SELF-POWERED; SILICON SUBSTRATES; THIN FILM PIEZOELECTRIC; TRANSVERSAL MODES; ZNO;

ALUMINUM; CHEMICAL BONDS; DESIGN; ELECTRIC PROPERTIES; ENERGY HARVESTING; FABRICATION; FIELD EMISSION MICROSCOPES; FINITE ELEMENT METHOD; MAGNETRON SPUTTERING; MEMS; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; SENSOR NODES; SILICON; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; ZINC OXIDE;

PIEZOELECTRICITY;

EID: 84870239141     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-012-1550-9     Document Type: Conference Paper

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