Piezoelectric zinc oxide thin film for MEMS application: A comparative study

Proceedings of the 3rd International Conference on Sensing Technology, ICST 2008

Volumn , Issue , 2008, Pages 543-546

  Gokhale, Nikhil ^a   Parmar, Mitesh ^a   Rajanna, K ^a   Nayak, M M ^b  

^a INDIAN INSTITUTE OF SCIENCE   (India)

^b Semi conductor Laboratory   (India)

Author keywords

Cantilever technique; Dynamic response; Piezoelectric thin film

Indexed keywords

ATOMIC FORCE MICROSCOPY; DYNAMIC RESPONSE; ELECTRODEPOSITION; NANOCANTILEVERS; PIEZOELECTRICITY; THIN FILM DEVICES; THIN FILMS; ZINC; ZINC OXIDE;

CANTILEVER TECHNIQUE; COMPARATIVE STUDIES; DIRECT METHODS; EXPERIMENTAL SET-UP; INDIRECT METHODS; MEMS APPLICATIONS; PIEZOELECTRIC PROPERTIES; PIEZOELECTRIC THIN FILM; SPUTTERED THIN FILMS; ZINC OXIDE THIN FILMS;

PIEZOELECTRIC TRANSDUCERS;

EID: 63049108105     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENST.2008.4757165     Document Type: Conference Paper

References (4)

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4. S.B. Krupanidhi and M.S. Sayer, "Position and pressure effects in rf magnetron reactive sputter deposition of piezoelectric zinc oxide", Journal of Applied Physics, vol. 56(11), pp. 3308-3318, 1984.