Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications

Microsystem Technologies

Volumn 17, Issue 4, 2011, Pages 563-573

  Ralib, Aliza Aini Md ^a   Nordin, Anis Nurashikin ^a   Othman, Raihan ^a   Salleh, Hanim ^b  

^a INTERNATIONAL ISLAMIC UNIVERSITY MALAYSIA   (Malaysia)

^b Universiti Tenaga Nasional   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC APPLICATION; ACOUSTIC SENSORS; ACOUSTIC VIBRATION; COPPER ELECTRODES; ELECTRICAL POWER; ENERGY HARVESTER; EXPERIMENTAL MEASUREMENTS; FINITE ELEMENT MODELLING; HIGH-FREQUENCY SOUNDS; MEMS FABRICATION; MICROGENERATORS; MONITORING SYSTEM; NICHE APPLICATIONS; NOISE DETECTION; OUTPUT VOLTAGES; PIEZOELECTRIC THIN FILMS; POWER LEVELS; SELF-POWERED; SIMULATION RESULT; STAINLESS STEEL SUBSTRATES; VIBRATION FREQUENCY;

ACOUSTIC DEVICES; DESIGN; HARVESTERS; OPEN CIRCUIT VOLTAGE; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; SENSOR NODES; SENSORS; STAINLESS STEEL; TELECOMMUNICATION EQUIPMENT; X RAY DIFFRACTION; ZINC OXIDE;

ACOUSTIC NOISE;

EID: 79958801886     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1228-8     Document Type: Conference Paper

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