Design and fabrication of flexible piezo-microgenerator by depositing ZnO thin films on PET substrates

Sensors and Actuators, A: Physical

Volumn 159, Issue 1, 2010, Pages 96-104

  Pan, C T ^a   Liu, Z H ^a   Chen, Y C ^b   Liu, C F ^c  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^c DEPARTMENT OF PHYSICS   (Taiwan)

Author keywords

Coupled field analysis; Energy harvesting; Flexible substrate; Imprinting; Piezoelectric material; ZnO

Indexed keywords

ACTIVE AREA; BOTTOM ELECTRODES; CANTILEVER STRUCTURES; CIRCUIT VOLTAGES; COUPLED FIELD ANALYSIS; CRYSTAL GRAINS; EFFICIENT ENERGY TRANSFER; FLEXIBLE DEVICE; FLEXIBLE SUBSTRATE; FREQUENCY RESPONSE FUNCTIONS; HARMONIC RESPONSE; HIGH QUALITY; IMPRINTING PROCESS; LARGE DISPLACEMENTS; MECHANICAL STRUCTURES; METAL SUBSTRATE; MICROGENERATORS; MODAL PARAMETERS; NEW DESIGN; NEW PROCESS; PET SUBSTRATE; PIEZOELECTRIC CANTILEVER PLATE; PIEZOELECTRIC GENERATORS; PIEZOELECTRIC THIN FILMS; POWER HARVESTING; POWER OUT PUT; RADIO FREQUENCIES; SILICON ON INSULATOR; SIMULATED RESULTS; ULTRAVIOLET-CURABLE; ZNO; ZNO THIN FILM;

ATOMIC FORCE MICROSCOPY; COPPER; DEPOSITION; DESIGN; DYNAMIC RESPONSE; ENERGY HARVESTING; ENERGY TRANSFER; FREQUENCY RESPONSE; HARMONIC FUNCTIONS; HARVESTING; MEMS; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; MODAL ANALYSIS; NANOCANTILEVERS; OPEN CIRCUIT VOLTAGE; OPTICAL FILMS; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; POLYETHYLENE TEREPHTHALATES; RESINS; THERMOPLASTICS; THIN FILM DEVICES; THIN FILMS; ZINC; ZINC OXIDE;

SUBSTRATES;

EID: 77950341982     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.02.023     Document Type: Article

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